Patents by Inventor Martin Dieter Nico PETERS

Martin Dieter Nico PETERS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR POSITIONING AND CLAMPED CURING
    Publication number: 20210271159
    Abstract: An apparatus including: a first gripping member having a first magnetic element and moveable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; and a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position.
    Type: Application
    Filed: June 3, 2019
    Publication date: September 2, 2021
    Applicant: ASML NETHERLAND B.V.
    Inventors: Martin Dieter Nico PETERS, Marcellus Antonius DE FOLTER
  • Sensor system, substrate handling system and lithographic apparatus
    Patent number: 10007197
    Abstract: A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.
    Type: Grant
    Filed: March 2, 2015
    Date of Patent: June 26, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Joeri Lof, Joost Kauffman, Martin Dieter Nico Peters, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel, Gerard Van Den Eijkel, Harmen Klaas Van Der Schoot, Raimond Visser
  • SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20160370716
    Abstract: A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.
    Type: Application
    Filed: March 2, 2015
    Publication date: December 22, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Joeri LOF, Joost KAUFFMAN, Martin Dieter Nico PETERS, Petrus Theodorus RUTGERS, Martijn Hendrikus Wilhelmus STOPEL, Gerard VAN DEN EIJKEL, Harmen Klaas VAN DER SCHOOT, Raimond VISSER