Abstract: Disclosed is a radio frequency (RF) calorimeter having National Metrology Institute (NMI) traceable measurement accuracy with uncertainty of less than about ±0.25%, including the incorporation of a low-frequency reference source integral to the calorimeter for the purpose of self-calibration, a load with very high thermal efficiency, a temperature-controlled load enclosure, a vacuum relay high-power RF switch, an integrated low-frequency reference source, a non-reactive coolant liquid, a liquid-to-liquid heat exchanger, a self-calibration routine that can be performed on demand, and machine learning algorithms to create more accurate data models.

Abstract: A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe is connected to an RF transmission line for receiving and measuring voltage and current signals from the transmission line. A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental, intermodulation, triple beat, and harmonic amplitude and phase information corresponding to the original RF signals. The measurement system may also inhibit arcing by detecting when the amplitude of the intermodulation or triple beat signal exceeds a predetermined threshold, and indicating an alarm and/or reducing the power of the plasma generator when the predetermined threshold is exceeded.

Abstract: Disclosed is a radio frequency (RF) power sensor having measurement uncertainty of less than about ±0.3%, with the ability to adjust its own calibration to maintain its accuracy over time and changing environmental conditions, by means of a suite of environmental and condition-monitoring sensors that are correlated through a model of the power sensor to the behavior of multiple measurement channels in the presence of a wide range of environmental conditions and customer use-cases. The model can incorporate one or more of artificial intelligence, machine learning, neural network, and/or large data model.

Abstract: Disclosed is a radio frequency (RF) power sensor having measurement uncertainty of less than about ±0.3%, which is achieved through the use of cross-correlation for reduction of uncertainty. The power sensor may have multiple couplers, multiple detectors, and at least one analog to digital converter. Also disclosed is a method for operating the power sensor to realize measurement uncertainty of less than about ±0.3% due to the uncorrelated nature of the measurements, as well as one or more of identifying the need for power sensor calibration, extending the time between calibrations, and predicting remaining time until calibration is required.

Abstract: Disclosed is a liquid-cooled termination for calorimic RF power measurement having an RF transmission line, a coolant flowpath having a coolant input and a coolant output, and an RF load. The RF transmission line being electrical communication with said RF load having a resistor and a heat sink. The RF load is in the coolant flowpath, such that said heat generated by the RF power being applied to the RF load through said RF transmission line is convected to the coolant while said coolant flows past said RF load.

Abstract: Disclosed is a radio frequency (RF) calorimeter having National Metrology Institute (NMI) traceable measurement accuracy with uncertainty of less than about +0.25%, including the incorporation of a low-frequency reference source integral to the calorimeter for the purpose of self-calibration, a load with very high thermal efficiency, a temperature-controlled load enclosure, a vacuum relay high-power RF switch, an integrated low-frequency reference source, a non-reactive coolant liquid, a liquid-to-liquid heat exchanger, a self-calibration routine that can be performed on demand, and machine learning algorithms to create more accurate data models.