Patents by Inventor Martin Durs

Martin Durs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetron sputter source with multipart target
    Publication number: 20020162737
    Abstract: A device and method has a magnetron sputter source with a multipart target (3, 4) and movable magnet system (5). By variation of the power delivery of the power supply (6), specific areas of the multipart target (3, 4) can be preferably affected, which permits setting the stoichiometry of the sputtered-off target materials on the substrate (15) to be covered and positively affecting the homogeneity of the layer structure.
    Type: Application
    Filed: April 29, 2002
    Publication date: November 7, 2002
    Inventor: Martin Durs