Abstract: A ceramic planar sensor element having four contact surfaces and three vias, for example for a lambda sensor. Measures are provided for increasing the loadability of the sensor element in relation to mechanical stresses. The measures relate in particular to the arrangement of the vias and to the design of insulating layers in the interior of the sensor element.

Abstract: Gas sensors are provided that are fashioned such that there is an increased flow over the sensor element. In this way, a good measurement dynamic is achieved even when these gas sensors are exposed to exhaust gases having a low flow speed.

Abstract: A method for detecting particles, for example in an exhaust gas stream of a vehicle in which the exhaust gas stream is guided along a duct, includes using a particle sensor that has at least two electrodes arranged in the duct. The method includes applying a first voltage and a second voltage to the electrodes to produce a first electric field and a second electric field between the electrodes. The method also includes ascertaining a first capacitance value corresponding to the first electric field and a second capacitance value corresponding to the second electric field of a capacitor formed by the electrodes. Information relating to the particles contained in the exhaust gas stream is ascertained from the first capacitance value and the second capacitance value.

Abstract: Gas sensors are provided that are fashioned such that there is an increased flow over the sensor element. In this way, a good measurement dynamic is achieved even when these gas sensors are exposed to exhaust gases having a low flow speed.

Abstract: A dielectric material for use in electrical energy storage devices includes at least two nanostructures which are each embedded in an electrically insulating matrix made of a material having a bandgap greater than a material of the nanostructures. A probability different from zero of charge carrier tunnelling in parallel to a direction of an electrical field that can be used from outside is set between the two nanostructures.

Abstract: A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area.

Abstract: A method for detecting particles, for example in an exhaust gas stream of a vehicle in which the exhaust gas stream is guided along a duct, includes using a particle sensor that has at least two electrodes arranged in the duct. The method includes applying a first voltage and a second voltage to the electrodes to produce a first electric field and a second electric field between the electrodes. The method also includes ascertaining a first capacitance value corresponding to the first electric field and a second capacitance value corresponding to the second electric field of a capacitor formed by the electrodes. Information relating to the particles contained in the exhaust gas stream is ascertained from the first capacitance value and the second capacitance value.

Abstract: A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

Abstract: A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area.

Abstract: A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

Abstract: A micromechanical component and a corresponding production method. The micromechanical component includes a first component and a second component, with which the first component is connected by an alloy region; the first and second components enclosing a vacuum region or residual gas region, which is sealed by the alloy region.