Patents by Inventor Martin F. Fay

Martin F. Fay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9958254
    Abstract: Calibrating a scanning interferometry imaging system includes: configuring the scanning interferometry imaging system for operation with an interference objective using light having a narrowband wavelength spectrum; using the scanning interferometry imaging system to direct measurement light and reference light along different paths and to overlap the measurement and reference light on a detector, the measurement and reference light having the narrowband wavelength spectrum; scanning an optical path length difference between the measurement light and the reference light at the detector while acquiring intensity data using the detector, the detector acquiring the intensity data at a frame rate and the scanning being performed at a scan speed; determining information about the scan speed based on the acquired intensity data, geometric information about the scanning interferometry imaging system, and the narrowband wavelength spectrum; and calibrating the scanning interferometry imaging system based on the infor
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: May 1, 2018
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Jake Beverage, Xavier Colonna de Lega, Martin F. Fay
  • Patent number: 9658129
    Abstract: A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: May 23, 2017
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna de Lega, Martin F. Fay, Peter J. de Groot
  • Patent number: 9599534
    Abstract: A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: March 21, 2017
    Assignee: Zygo Corporation
    Inventors: Martin F. Fay, Xavier Colonna de Lega, Peter J. de Groot
  • Publication number: 20160047645
    Abstract: Calibrating a scanning interferometry imaging system includes: configuring the scanning interferometry imaging system for operation with an interference objective using light having a narrowband wavelength spectrum; using the scanning interferometry imaging system to direct measurement light and reference light along different paths and to overlap the measurement and reference light on a detector, the measurement and reference light having the narrowband wavelength spectrum; scanning an optical path length difference between the measurement light and the reference light at the detector while acquiring intensity data using the detector, the detector acquiring the intensity data at a frame rate and the scanning being performed at a scan speed; determining information about the scan speed based on the acquired intensity data, geometric information about the scanning interferometry imaging system, and the narrowband wavelength spectrum; and calibrating the scanning interferometry imaging system based on the infor
    Type: Application
    Filed: August 11, 2015
    Publication date: February 18, 2016
    Inventors: Peter J. de Groot, Jake Beverage, Xavier Colonna de Lega, Martin F. Fay
  • Publication number: 20160047712
    Abstract: A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.
    Type: Application
    Filed: August 13, 2015
    Publication date: February 18, 2016
    Inventors: Xavier Colonna de Lega, Martin F. Fay, Peter J. de Groot
  • Publication number: 20160047711
    Abstract: A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.
    Type: Application
    Filed: August 13, 2015
    Publication date: February 18, 2016
    Inventors: Martin F. Fay, Xavier Colonna de Lega, Peter J. de Groot
  • Patent number: 8311377
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one waveguide (7a3) to another (7a2), controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: November 13, 2012
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Publication number: 20120033217
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one waveguide (7a3) to another (7a2), controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Application
    Filed: September 19, 2011
    Publication date: February 9, 2012
    Applicant: Brown University Research Foundation
    Inventors: Daniel LEVNER, Martin F. FAY, Jingming XU
  • Patent number: 8041163
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one waveguide to another, controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Grant
    Filed: February 19, 2009
    Date of Patent: October 18, 2011
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Patent number: 7693370
    Abstract: An optical component including at least one optical supergrating is provided. The optical supergrating includes a quantized refractive index profile adapted to exhibit a finite plurality of refractive indexes; which in turn are adapted to generate a reflectance spectrum in at least one spectral band corresponding to a Fourier transformed analog refractive index profile.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: April 6, 2010
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay
  • Publication number: 20090180736
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one wavelength to another, controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Application
    Filed: February 19, 2009
    Publication date: July 16, 2009
    Applicant: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Patent number: 7496257
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one waveguide to another, controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Grant
    Filed: January 9, 2008
    Date of Patent: February 24, 2009
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Patent number: 7471859
    Abstract: An optical waveguide has a surface. An array of separately actuated bodies is disposed proximal to the exposed surface, and an actuator separately actuates at least some of the bodies to change a spectral characteristic of a wave propagating through the waveguide. Preferably, the bodies are metal striplines, an electro-optical material is disposed between the striplines and the exposed surface, and the actuator is a CMOS chip that imposes a voltage to some or all of the lines. The voltage changes the refractive index at the interface with the surface, changing an index of refraction profile of the waveguide and effectively imposing a grating. Alternatively, the bodies are micro-beams and the actuator, also controlled by a CMOS chip, separately moves each micro-beam into and out of proximity to the surface. The grating is programmable via the CMOS chip.
    Type: Grant
    Filed: August 15, 2007
    Date of Patent: December 30, 2008
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jonathan C. Bloch, Jeffrey Weiss
  • Patent number: 7373045
    Abstract: An optical component including at least one optical supergrating is provided. The optical supergrating includes a quantized refractive index profile adapted to exhibit a finite plurality of refractive indexes; which in turn are adapted to generate a reflectance spectrum in at least one spectral band corresponding to a Fourier transformed analog refractive index profile.
    Type: Grant
    Filed: July 3, 2002
    Date of Patent: May 13, 2008
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay
  • Patent number: 7356224
    Abstract: Optical gratings that perform a number of functions at various wavelengths are formed by various methods that preserve spectral information within a wavelength band, the functions including: coupling radiation from one waveguide to another, controllable gratings that operate on different wavelengths in response to external control signals.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: April 8, 2008
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Patent number: 7263258
    Abstract: An optical waveguide has a surface. An array of separately actuated bodies is disposed proximal to the exposed surface, and an actuator separately actuates at least some of the bodies to change a spectral characteristic of a wave propagating through the waveguide. Preferably, the bodies are metal striplines, an electro-optical material is disposed between the striplines and the exposed surface, and the actuator is a CMOS chip that imposes a voltage to some or all of the lines. The voltage changes the refractive index at the interface with the surface, changing an index of refraction profile of the waveguide and effectively imposing a grating. Alternatively, the bodies are micro-beams and the actuator, also controlled by a CMOS chip, separately moves each micro-beam into and out of proximity to the surface. The grating is programmable via the CMOS chip.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: August 28, 2007
    Assignee: Brown University Research Foundation
    Inventors: Daniel Levner, Martin F. Fay, Jonathan C. Bloch, Jeffrey Weiss
  • Patent number: 6657786
    Abstract: The present invention relates to a method for synthesizing supergratings using Fourier analysis. The method divides the synthesis process into two stages: synthesis of an “analog” grating profile, followed by a quantization step. The method provides a generalized procedure for analog synthesis by drawing on the Fourier approximation and on finite-impulse-response (FIR) filter design theory, while it interprets the simple threshold quantization as a “zeroth order” Delta-Sigma Modulator, which it improves.
    Type: Grant
    Filed: May 13, 2002
    Date of Patent: December 2, 2003
    Assignee: Digital LightCircuits, Inc.
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Publication number: 20030007733
    Abstract: An optical component including at least one optical supergrating is provided. The optical supergrating includes a quantized refractive index profile adapted to exhibit a finite plurality of refractive indexes; which in turn are adapted to generate a reflectance spectrum in at least one spectral band corresponding to a Fourier transformed analog refractive index profile.
    Type: Application
    Filed: July 3, 2002
    Publication date: January 9, 2003
    Inventors: Daniel Levner, Martin F. Fay
  • Publication number: 20020154410
    Abstract: The present invention relates to a method for synthesizing supergratings using Fourier analysis. The method divides the synthesis process into two stages: synthesis of an “analog” grating profile, followed by a quantization step. The method provides a generalized procedure for analog synthesis by drawing on the Fourier approximation and on finite-impulse-response (FIR) filter design theory, while it interprets the simple threshold quantization as a “zeroth order” Delta-Sigma Modulator, which it improves.
    Type: Application
    Filed: May 13, 2002
    Publication date: October 24, 2002
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu
  • Patent number: 6415081
    Abstract: The present invention relates to a method for synthesizing supergratings using Fourier analysis. The method divides the synthesis process into two stages: synthesis of an “analog” grating profile, followed by a quantization step. The method provides a generalized procedure for analog synthesis by drawing on the Fourier approximation and on finite-inpulse-response (FIR) filter design theory, while it interprets the simple threshold quantization as a “zeroth order” Delta-Sigma Modulator, which it improves.
    Type: Grant
    Filed: August 4, 2000
    Date of Patent: July 2, 2002
    Inventors: Daniel Levner, Martin F. Fay, Jingming Xu