Patents by Inventor Martin F. Yeoman

Martin F. Yeoman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum chamber gate valve and method for making same
    Patent number: 5667197
    Abstract: Disclosed is a method for implementing a gate drive valve assembly used to isolate interfacing chambers. The method includes: (a) providing a drive assembly having at least one surface for attaching to a chamber, the drive assembly being mounted to the chamber such that a shaft contained within the drive assembly translates from the drive assembly through the at least one surface and along a bore in the chamber; and (b) attaching a gate plate to an end of the shaft when the shaft is at least partly within the chamber after translating along the bore.
    Type: Grant
    Filed: July 9, 1996
    Date of Patent: September 16, 1997
    Assignee: Lam Research Corporation
    Inventors: Trace L. Boyd, Martin F. Yeoman