Abstract: A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow sensor, which can be for example a microsensor having a microbrick® structure, has a hydrophilic layer which is disposed on the substrate and covers the sensing element(s). The hydrophilic layer is preferably formed from a spin on glass material, such as for example a silicate or phosphosilicate. A silicon nitride layer can be disposed on the sensing element(s) and interpose the substrate and the hydrophilic layer. The silicon nitride layer can be oxidized, for example, by means of plasma oxidation or oxygen ion implantation so to form the hydrophilic layer thereon. A variety of other hydrophilic compounds can be utilized to form the hydrophilic layer such as, gold, palladium and diamond like carbon.

Abstract: A flow sensor system includes a plurality of flow sensor chips, wherein each flow sensor chip among the plurality of flow sensor chips comprises a substrate, a heater element, a heater control circuit, and flow sensor component formed on the substrate, wherein the heater element is disposed separately from the heater control circuit on the substrate, wherein the heater control circuit is thermally isolated from the heater element and the flow sensor component. Additionally, an air gap can be formed between each sensor chip among the plurality of flow sensor chips, wherein the plurality of flow sensor chips comprises a flow sensor system in which each of the flow sensor chips are separated from one another by the air gap formed therebetween in order to reduce output distortion, response time, warm-up time, drift and noise associated with the plurality of flow sensor chips.

Abstract: Indirect airflow measurement through breath-operated device is accomplished by incorporating an airflow sensor into the inhaler device along a low resistance channel disposed away from the exhaust chamber of the device and having an input port in airflow communication with a low resistance channel and output input port and low resistance channel are formed in the main housing body of the device, and further incorporating an output port formed near the exhaust changer near the mouthpiece assembly, the output port also in airflow communication with the low resistance channel. A method of measuring airflow in an inhalation device is also described that measures air flowing through the low resistance channel. Another aspect of the invention provides a method that allows for the closure of the devices' airflow ports, by allowing for the rotation of the mouthpiece assembly from open to closed positions relative to the inhaling device's main housing body and towards handle assembly.

Abstract: Disclosed are improved methods and systems for measuring flowing through an inhaler device. Airflow sensing systems and methods are described that allow for indirect measurement of air flowing through a breath-operated inhaler device. Indirect airflow measurement through a breath-operated device can be accomplished by incorporating an airflow sensor into the inhaler device along a low resistance channel disposed away from the exhaust chamber of the device and having an input port in airflow communication with a low resistance channel and both input port and low resistance channel are formed in the main housing body of the device, and further incorporating an output port formed near the exhaust chamber near the mouthpiece assembly, the output port also in airflow communication with the low resistance channel. A method of measuring airflow in an inhalation device is also described that measures air flowing through the low resistance channel.

Abstract: An integrated module is provided for measuring a flow rate of a fluid, whether gaseous or liquid, with a flow restrictor comprising a plurality of orifices adapted to a flow channel of the integrated module and a sensor mounted to measure a property of the fluid at said flow restrictor corresponding to the flow rate. The integrated module provided may be used in numerous flow systems, such as reactors, ventilators and respirators, and has the benefit of better laminarization of the flow as well as better calibration between the flow sensor and the flow restrictor for more accurate flow measurements.