Patents by Inventor Martin Haberjahn

Martin Haberjahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of Manufacturing a Semiconductor Device
    Publication number: 20090239314
    Abstract: Methods of manufacturing a semiconductor device and an apparatus for the manufacturing of semiconductor devices are provided. An embodiment regards providing a process which changes the volume of at least one layer of a semiconductor substrate or of at least one layer deposited on the semiconductor substrate, and measuring a change in volume of such at least one layer using fluorescence. In another embodiment, a change in volume of such at least one layer is measured using reflection of electromagnetic waves.
    Type: Application
    Filed: March 20, 2008
    Publication date: September 24, 2009
    Inventors: Martin Haberjahn, Sascha Dieter, Andrea Graf, Christoph Noelscher, Dirk Manger, Stephan Wege
  • Radiation Source and Method of Operating a Radiation Source in a Measurement Tool
    Publication number: 20080317208
    Abstract: A radiation source for a measurement tool includes an electron source configured to provide an electron beam, an anode configured to emit X-ray radiation under irradiation with the electron beam, and a deflection unit arranged between the electron source and the anode and operable to deflect the electron beam.
    Type: Application
    Filed: June 22, 2007
    Publication date: December 25, 2008
    Applicant: QIMONDA AG
    Inventors: Sascha Dieter, Andrea Lage, Martin Haberjahn