Patents by Inventor MARTIN J. RIPLEY

MARTIN J. RIPLEY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for selective gas injection and extraction
    Patent number: 11274368
    Abstract: Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: March 15, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Martin J. Ripley
  • APPARATUS FOR SELECTIVE GAS INJECTION AND EXTRACTION
    Publication number: 20190106786
    Abstract: Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.
    Type: Application
    Filed: December 11, 2018
    Publication date: April 11, 2019
    Inventor: MARTIN J. RIPLEY
  • Apparatus for selective gas injection and extraction
    Patent number: 10174422
    Abstract: Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: January 8, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventor: Martin J. Ripley
  • APPARATUS FOR SELECTIVE GAS INJECTION AND EXTRACTION
    Publication number: 20140120257
    Abstract: Methods and apparatus for selective gas injection and extraction for use in a substrate processing chamber are provided herein. In some embodiments, a gas injection and extraction apparatus includes a plate having a plurality of apertures through a thickness of the plate, each aperture of the plurality of apertures having an aperture wall; a plurality of tubes, each tube partially disposed within one of the plurality of apertures, wherein a disposed portion of each of the tubes is spaced apart from at least a portion of the aperture wall of the aperture in which it is disposed, thereby forming an interstice between at least a portion of the aperture wall and the disposed portion of the tube; a gas supply fluidly coupled to each of the tubes; and a vacuum source fluidly coupled to each of the interstices.
    Type: Application
    Filed: October 11, 2013
    Publication date: May 1, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventor: MARTIN J. RIPLEY