Patents by Inventor Martin Kienle

Martin Kienle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CONTROLLING A UNIT OF A PARTICLE BEAM DEVICE AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD
    Publication number: 20200333271
    Abstract: The invention described herein relates to a method for controlling a unit of a particle beam device for imaging, analyzing and/or processing an object. Moreover, the invention described herein relates to a particle beam device for carrying out the method.
    Type: Application
    Filed: May 5, 2020
    Publication date: October 22, 2020
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Christian Hendrich, Martin Kienle, Josef Biberger, Michal Postolski
  • Particle beam device
    Patent number: 7109487
    Abstract: A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam device makes it possible to align the surface of the object perpendicular to the beam axes of the particle beam columns, using simple means, in an accurate and error-free manner. The object slide assumes a basic position from which it may be tilted into the position in which the first or the second beam axis is perpendicular or at least almost perpendicular to the receiving surface of the object slide. In the basic position, a normal to the receiving surface of the object slide is spatially oriented such that an angle formed between the first beam axis and the normal is greater than or equal to an angle formed between the second beam axis and the normal.
    Type: Grant
    Filed: October 26, 2004
    Date of Patent: September 19, 2006
    Assignee: Carl Zeiss NTS GmbH
    Inventors: Martin Kienle, Helmut Muller, Peter Hoffrogge, Wilhelm Bolsinger
  • Particle beam device
    Publication number: 20050116165
    Abstract: A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam device makes it possible to align the surface of the object perpendicular to the beam axes of the particle beam columns, using simple means, in an accurate and error-free manner. The object slide assumes a basic position from which it may be tilted into the position in which the first or the second beam axis is perpendicular or at least almost perpendicular to the receiving surface of the object slide. In the basic position, a normal to the receiving surface of the object slide is spatially oriented such that an angle formed between the first beam axis and the normal is greater than or equal to an angle formed between the second beam axis and the normal.
    Type: Application
    Filed: October 26, 2004
    Publication date: June 2, 2005
    Inventors: Martin Kienle, Helmut Muller, Peter Hoffrogge, Wilhelm Bolsinger