Abstract: A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. Also, a pneumatic drive cylinder is provided having a cylindrical housing enclosing a first internal volume and a first piston assembly, having a first piston and a first piston rod. The first piston assembly can be moved into a fitting position by pressurization of the first internal volume. The device has at least one supporting pin connected to the first piston rod. The drive cylinder has a second piston assembly, which has a second piston and a second piston rod. The second piston assembly is arranged for motion coaxial to the first piston assembly. An end surface of the second piston rod faces the first piston. The first and second piston assemblies are arranged so the first piston and the second piston rod have no contact in the fitting position.

Abstract: A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.

Abstract: Disclosed is a pin lifting device for moving and positioning a substrate. Also, a pneumatic drive cylinder is provided having a cylindrical housing enclosing a first internal volume and a first piston assembly, having a first piston and a first piston rod. The first piston assembly can be moved into a fitting position by pressurization of the first internal volume. The device has at least one supporting pin connected to the first piston rod. The drive cylinder has a second piston assembly, which has a second piston and a second piston rod. The second piston assembly is arranged for motion coaxial to the first piston assembly. An end surface of the second piston rod faces the first piston. The first and second piston assemblies are arranged so the first piston and the second piston rod have no contact in the fitting position.

Abstract: A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).

Abstract: A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.

Abstract: A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).

Abstract: A vacuum valve with a housing having a valve seat, a closure member which, in a closed position, is pressed against the valve seat, and a manual actuator, by which the closure member is displaceable in a linear manner and which includes a screw transmission, which is actuatable by a rotational element and has a first driving part connected to the rotational element and a second driving part connected to the closure member. The driving parts have mating external and internal threads. A closing spring acts between the valve housing and the closure member. The first driving part is displaceable relative to the valve housing parallel to the closing direction, and with the closure member in the open position, the closure member is held against displacement in the closing direction by a supporting stop against which a stop face of the rotational element or of the first driving part abuts.