Patents by Inventor Martin Lambert
Martin Lambert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250180400Abstract: An arrangement for laser protection includes a reflecting and/or absorbing optical element configured to be irradiated by a laser beam, and a sensor having a substrate and a meandering electrical first conductor track arranged on a first side of the substrate. The sensor is arranged indirectly or directly on the optical element or configured to detect a damage to the optical element by the laser beam.Type: ApplicationFiled: February 7, 2025Publication date: June 5, 2025Inventors: Helge Hoeck, Fabian Werner, Jürgen Doettling, Markus Graf, Matthias Hartmann, Sergej Jazuk, Ullrich Weisshaar, Martin Lambert, André Anguita Lorenz
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Publication number: 20250105577Abstract: An apparatus for transmitting and/or reflecting a laser beam for at least partially correcting astigmatism of the laser beam includes an optical element for transmitting and/or reflecting the laser beam. The optical element is deformable by an external force. The apparatus further includes at least four supports for the optical element arranged along an imaginary circle. The at least four supports are aligned diametrically opposite one another in pairs. The apparatus further includes at least two deformation elements for exerting the external force on the optical element. The at least two deformation elements are arranged diametrically to one another with respect to a center of the imaginary circle through the at least four supports. Each of the at least two deformation elements is arranged on an angle bisector of an angle defined by two adjacent supports and the center of the imaginary circle through the at least four supports.Type: ApplicationFiled: December 11, 2024Publication date: March 27, 2025Inventors: Martin Lambert, Tolga Ergin, Andreas Hopf, Jens Wägerle, Oliver Schlosser
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Patent number: 12241172Abstract: A process for the making of metallic product with biocidal properties is disclosed, and first comprises anodizing a product having at least one metallic surface (e.g. aluminum, steel) using a controlled current density to form pores on the surfaces with controlled spatial density and depth. The process also comprises contacting the anodized metallic surfaces with a first biocidal solution before sealing the pores. Preferably, the metallic surfaces can be contacted again with the first biocidal solution after the sealing step. A method for reactivating biocidal properties of the metallic products is also disclosed, and comprises contacting again the biocidal product with a second biocidal solution. Preferably, the second solution is less concentrated than the first solution for safety sake. The invention provides a simpler, quicker, cheaper and improved process for treating or reactivating the metallic surfaces in order to obtain a metallic product having superior and enduring biocidal properties.Type: GrantFiled: June 9, 2022Date of Patent: March 4, 2025Assignee: A3 Surfaces Inc.Inventors: Maxime Dumont, Jocelyn Lambert, Guy Leblanc, Martin Lambert, Michel Lavoie, Jean-Pierre Collard, Myriam Auclair-Gilbert, Simon Gagnon
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Patent number: 12171054Abstract: An extreme ultraviolet (EUV) light source includes a providing device for providing a target material, a pulsed laser source for emitting a pulsed laser beam, and a beam guidance device for supplying the pulsed laser beam from the pulsed laser source into a radiation generation chamber and for focused irradiation of the target material with the pulsed laser beam. The target material is configured to emit EUV radiation on account of the irradiation. The beam guidance device includes a beam positioning device comprising four mirrors as two mirror pairs for positioning the pulsed laser beam. Each of the four mirrors is rotatable about exactly one axis of rotation. The axes of rotation of the two mirrors of a first mirror pair are aligned along a first spatial direction. The axes of rotation of the two mirrors of a second mirror pair are aligned along a second spatial direction.Type: GrantFiled: April 24, 2024Date of Patent: December 17, 2024Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing SEInventors: Martin Lambert, Boris Regaard, Tolga Ergin, Oliver Schlosser
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Patent number: 12140570Abstract: A method and system for analysing a condition of a pipeline in real time is disclosed. The method and system comprise generating a transient pressure wave in fluid carried along the pipeline and detecting a transient pressure wave interaction signal responsive to the transient pressure wave where the pressure wave interaction signal has a time duration corresponding to a region of interest of the pipeline. The method and system further includes processing the transient pressure wave interaction signal to analyse the region of interest of the pipeline.Type: GrantFiled: November 22, 2019Date of Patent: November 12, 2024Assignee: THE UNIVERSITY OF ADELAIDEInventors: Jessica Maria Bohorquez Arevalo, Angus Simpson, Martin Lambert, Bradley James Alexander
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Publication number: 20240357726Abstract: An extreme ultraviolet (EUV) light source includes a providing device for providing a target material, a pulsed laser source for emitting a pulsed laser beam, and a beam guidance device for supplying the pulsed laser beam from the pulsed laser source into a radiation generation chamber and for focused irradiation of the target material with the pulsed laser beam. The target material is configured to emit EUV radiation on account of the irradiation. The beam guidance device includes a beam positioning device comprising four mirrors as two mirror pairs for positioning the pulsed laser beam. Each of the four mirrors is rotatable about exactly one axis of rotation. The axes of rotation of the two mirrors of a first mirror pair are aligned along a first spatial direction. The axes of rotation of the two mirrors of a second mirror pair are aligned along a second spatial direction.Type: ApplicationFiled: April 24, 2024Publication date: October 24, 2024Inventors: Martin Lambert, Boris Regaard, Tolga Ergin, Oliver Schlosser
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Patent number: 11835699Abstract: A focusing device for focusing a laser beam in a target area. The focusing device includes a paraboloid mirror configured to widen the laser beam; an ellipsoid mirror or a hyperboloid mirror configured to focus the widened laser beam at a focal position within the target area; and a movement device. The movement device is configured to move the ellipsoid mirror or the hyperboloid mirror relative to the paraboloid mirror, or together with the paraboloid mirror, to change the focal position within the target area.Type: GrantFiled: November 13, 2020Date of Patent: December 5, 2023Assignee: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHInventors: Martin Lambert, Tolga Ergin
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Patent number: 11675202Abstract: A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam, and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.Type: GrantFiled: October 22, 2020Date of Patent: June 13, 2023Assignee: TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHInventors: Martin Lambert, Tolga Ergin
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Publication number: 20220298666Abstract: A process for the making of metallic product with biocidal properties is disclosed, and first comprises anodizing a product having at least one metallic surface (e.g. aluminum, steel) using a controlled current density to form pores on the surfaces with controlled spatial density and depth. The process also comprises contacting the anodized metallic surfaces with a first biocidal solution before sealing the pores. Preferably, the metallic surfaces can be contacted again with the first biocidal solution after the sealing step. A method for reactivating biocidal properties of the metallic products is also disclosed, and comprises contacting again the biocidal product with a second biocidal solution. Preferably, the second solution is less concentrated than the first solution for safety sake. The invention provides a simpler, quicker, cheaper and improved process for treating or reactivating the metallic surfaces in order to obtain a metallic product having superior and enduring biocidal properties.Type: ApplicationFiled: June 9, 2022Publication date: September 22, 2022Applicant: A3 SURFACES INC.Inventors: Maxime DUMONT, Jocelyn LAMBERT, Guy LEBLANC, Martin LAMBERT, Michel LAVOIE, Jean-Pierre COLLARD, Myriam AUCLAIR-GILBERT, Simon GAGNON
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Patent number: 11225884Abstract: A rocker arm has two side walls and two webs which run transversely with respect to the side wall. The webs connect the side walls to one another on end-side sections, wherein a valve stem support is configured on one of the webs, and a spherical cap is configured on the other web. A cam roller is arranged in a roller pocket which is delimited by the webs and the side walls. The cam roller is mounted rotatably on a roller axle which is fixed in the side walls. Projections are arranged within the roller pocket such that they are spaced apart from the respective web to guide the cam roller. The projections extend from the side walls in the direction of the cam roller to form guide surfaces which interact with end surfaces of the cam roller.Type: GrantFiled: September 21, 2018Date of Patent: January 18, 2022Assignee: Schaeffler Technologies AG & Co. KGInventors: Arben Haxhiu, Martin Lambert, Michael Schewe, Bernhard Kühnel, Matthias Thoelking
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Publication number: 20220011275Abstract: A method and system for analysing a condition of a pipeline in real time is disclosed. The method and system comprise generating a transient pressure wave in fluid carried along the pipeline and detecting a transient pressure wave interaction signal responsive to the transient pressure wave where the pressure wave interaction signal has a time duration corresponding to a region of interest of the Generate Transient Pressure pipeline. The method and system further includes processing the transient pressure wave interaction signal to analyse the region of interest of the pipeline.Type: ApplicationFiled: November 22, 2019Publication date: January 13, 2022Inventors: Jessica Maria BOHORQUEZ AREVALO, Angus SIMPSON, Martin LAMBERT, Bradley James ALEXANDER
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Publication number: 20210063712Abstract: A focusing device for focusing a laser beam in a target area. The focusing device includes a paraboloid mirror configured to widen the laser beam; an ellipsoid mirror or a hyperboloid mirror configured to focus the widened laser beam at a focal position within the target area; and a movement device. The movement device is configured to move the ellipsoid mirror or the hyperboloid mirror relative to the paraboloid mirror, or together with the paraboloid mirror, to change the focal position within the target area.Type: ApplicationFiled: November 13, 2020Publication date: March 4, 2021Inventors: Martin Lambert, Tolga Ergin
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Publication number: 20210041708Abstract: A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam , and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.Type: ApplicationFiled: October 22, 2020Publication date: February 11, 2021Inventors: Martin Lambert, Tolga Ergin
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Publication number: 20200370447Abstract: A rocker arm has two side walls and two webs which run transversely with respect to the side wall. The webs connect the side walls to one another on end-side sections, wherein a valve stem support is configured on one of the webs, and a spherical cap is configured on the other web. A cam roller is arranged in a roller pocket which is delimited by the webs and the side walls. The cam roller is mounted rotatably on a roller axle which is fixed in the side walls. Projections are arranged within the roller pocket such that they are spaced apart from the respective web to guide the cam roller. The projections extend from the side walls in the direction of the cam roller to form guide surfaces which interact with end surfaces of the cam roller.Type: ApplicationFiled: September 21, 2018Publication date: November 26, 2020Applicant: Schaeffler Technologies AG & Co. KGInventors: Arben Haxhiu, Martin Lambert, Michael Schewe, Bernhard Kühnel, Matthias Thoelking
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Patent number: 10327318Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.Type: GrantFiled: July 21, 2017Date of Patent: June 18, 2019Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Martin Lambert, Tolga Ergin, Thomas Schwarzbaeck
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Patent number: 10264660Abstract: The disclosure relates to a beam trap including: a reflector for reflecting a beam, in particular a laser beam, that is incident on a surface of the reflector, and an absorber device for absorbing the beam reflected at the surface of the reflector. The surface of the reflector is segmented and has a plurality of reflector regions that are configured for reflecting a respective partial beam of the incident beam into an absorber region of the absorber device that is associated with the respective reflector region. The disclosure also relates to a beam guide device having a beam trap of this type, an EUV radiation generation apparatus having a beam guide device of this type, and an associated method for absorbing a beam, in particular for absorbing a laser beam.Type: GrantFiled: August 30, 2017Date of Patent: April 16, 2019Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventor: Martin Lambert
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Publication number: 20170367167Abstract: The disclosure relates to a beam trap including: a reflector for reflecting a beam, in particular a laser beam, that is incident on a surface of the reflector, and an absorber device for absorbing the beam reflected at the surface of the reflector. The surface of the reflector is segmented and has a plurality of reflector regions that are configured for reflecting a respective partial beam of the incident beam into an absorber region of the absorber device that is associated with the respective reflector region. The disclosure also relates to a beam guide device having a beam trap of this type, an EUV radiation generation apparatus having a beam guide device of this type, and an associated method for absorbing a beam, in particular for absorbing a laser beam.Type: ApplicationFiled: August 30, 2017Publication date: December 21, 2017Inventor: Martin Lambert
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Publication number: 20170325325Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.Type: ApplicationFiled: July 21, 2017Publication date: November 9, 2017Inventors: Martin Lambert, Tolga Ergin, Thomas Schwarzbaeck
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Patent number: 9803517Abstract: A valve-actuating lever for reciprocating-piston internal combustion engines is proposed, wherein this lever is supported on a cylinder head of the internal combustion engine or a part of this cylinder head, is in active connection with a cam of a camshaft, has an essentially inverted U-shaped cross section, is made from steel sheet metal by a punching, bending, and/or deep-drawing measure, and has, in addition to a support plate (5) for a shaft of a gas-exchange valve or for an intermediate piece, lateral guide cheeks (3, 4). A height of the lateral guide cheeks (3, 4) can be changed with regard to the support plate (5) by an embossing procedure.Type: GrantFiled: November 13, 2015Date of Patent: October 31, 2017Assignee: Schaeffler Technologies AG & Co. KGInventors: Martin Lambert, Ralph Teichgraber
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Patent number: 9642235Abstract: An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.Type: GrantFiled: December 28, 2015Date of Patent: May 2, 2017Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventors: Joachim Schulz, Martin Lambert