Abstract: A focusing device for focusing a laser beam in a target area. The focusing device includes a paraboloid mirror configured to widen the laser beam; an ellipsoid mirror or a hyperboloid mirror configured to focus the widened laser beam at a focal position within the target area; and a movement device. The movement device is configured to move the ellipsoid mirror or the hyperboloid mirror relative to the paraboloid mirror, or together with the paraboloid mirror, to change the focal position within the target area.

Abstract: A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam, and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.

Abstract: A process for the making of metallic product with biocidal properties is disclosed, and first comprises anodizing a product having at least one metallic surface (e.g. aluminum, steel) using a controlled current density to form pores on the surfaces with controlled spatial density and depth. The process also comprises contacting the anodized metallic surfaces with a first biocidal solution before sealing the pores. Preferably, the metallic surfaces can be contacted again with the first biocidal solution after the sealing step. A method for reactivating biocidal properties of the metallic products is also disclosed, and comprises contacting again the biocidal product with a second biocidal solution. Preferably, the second solution is less concentrated than the first solution for safety sake. The invention provides a simpler, quicker, cheaper and improved process for treating or reactivating the metallic surfaces in order to obtain a metallic product having superior and enduring biocidal properties.

Abstract: A rocker arm has two side walls and two webs which run transversely with respect to the side wall. The webs connect the side walls to one another on end-side sections, wherein a valve stem support is configured on one of the webs, and a spherical cap is configured on the other web. A cam roller is arranged in a roller pocket which is delimited by the webs and the side walls. The cam roller is mounted rotatably on a roller axle which is fixed in the side walls. Projections are arranged within the roller pocket such that they are spaced apart from the respective web to guide the cam roller. The projections extend from the side walls in the direction of the cam roller to form guide surfaces which interact with end surfaces of the cam roller.

Abstract: A method and system for analysing a condition of a pipeline in real time is disclosed. The method and system comprise generating a transient pressure wave in fluid carried along the pipeline and detecting a transient pressure wave interaction signal responsive to the transient pressure wave where the pressure wave interaction signal has a time duration corresponding to a region of interest of the Generate Transient Pressure pipeline. The method and system further includes processing the transient pressure wave interaction signal to analyse the region of interest of the pipeline.

Abstract: A focusing device for focusing a laser beam in a target area. The focusing device includes a paraboloid mirror configured to widen the laser beam; an ellipsoid mirror or a hyperboloid mirror configured to focus the widened laser beam at a focal position within the target area; and a movement device. The movement device is configured to move the ellipsoid mirror or the hyperboloid mirror relative to the paraboloid mirror, or together with the paraboloid mirror, to change the focal position within the target area.

Abstract: A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam , and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.

Abstract: A rocker arm has two side walls and two webs which run transversely with respect to the side wall. The webs connect the side walls to one another on end-side sections, wherein a valve stem support is configured on one of the webs, and a spherical cap is configured on the other web. A cam roller is arranged in a roller pocket which is delimited by the webs and the side walls. The cam roller is mounted rotatably on a roller axle which is fixed in the side walls. Projections are arranged within the roller pocket such that they are spaced apart from the respective web to guide the cam roller. The projections extend from the side walls in the direction of the cam roller to form guide surfaces which interact with end surfaces of the cam roller.

Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.

Abstract: The disclosure relates to a beam trap including: a reflector for reflecting a beam, in particular a laser beam, that is incident on a surface of the reflector, and an absorber device for absorbing the beam reflected at the surface of the reflector. The surface of the reflector is segmented and has a plurality of reflector regions that are configured for reflecting a respective partial beam of the incident beam into an absorber region of the absorber device that is associated with the respective reflector region. The disclosure also relates to a beam guide device having a beam trap of this type, an EUV radiation generation apparatus having a beam guide device of this type, and an associated method for absorbing a beam, in particular for absorbing a laser beam.

Abstract: The disclosure relates to a beam trap including: a reflector for reflecting a beam, in particular a laser beam, that is incident on a surface of the reflector, and an absorber device for absorbing the beam reflected at the surface of the reflector. The surface of the reflector is segmented and has a plurality of reflector regions that are configured for reflecting a respective partial beam of the incident beam into an absorber region of the absorber device that is associated with the respective reflector region. The disclosure also relates to a beam guide device having a beam trap of this type, an EUV radiation generation apparatus having a beam guide device of this type, and an associated method for absorbing a beam, in particular for absorbing a laser beam.

Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.

Abstract: A valve-actuating lever for reciprocating-piston internal combustion engines is proposed, wherein this lever is supported on a cylinder head of the internal combustion engine or a part of this cylinder head, is in active connection with a cam of a camshaft, has an essentially inverted U-shaped cross section, is made from steel sheet metal by a punching, bending, and/or deep-drawing measure, and has, in addition to a support plate (5) for a shaft of a gas-exchange valve or for an intermediate piece, lateral guide cheeks (3, 4). A height of the lateral guide cheeks (3, 4) can be changed with regard to the support plate (5) by an embossing procedure.

Abstract: An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.

Abstract: This disclosure relates to a device for monitoring the alignment of a laser beam, comprising: a detector having an opening for passage of the laser beam, at least two temperature sensors which are mounted on the detector, and a temperature monitoring device which is connected to the at least two temperature sensors, for monitoring the alignment of the laser beam relative to the opening. The at least two temperature sensors have a temperature-dependent resistance which either increases as the temperature increases or decreases as the temperature increases, and the at least two temperature sensors are connected in series with the temperature monitoring device. This disclosure relates also to an EUV radiation generating apparatus which has at least one device as described above for monitoring the alignment of a laser beam.

Abstract: In one implementation, a beam guiding apparatus includes a vacuum chamber that includes a target region arranged to receive a target material for generating EUV radiation. The vacuum chamber further includes a first opening for receiving into the vacuum chamber a first laser beam and a second opening for receiving into the vacuum chamber a second laser beam. The vacuum chamber also includes a superposition apparatus arranged to superpose the first laser beam having a first wavelength and a second laser beam having a second wavelength for common beam guidance in the direction of the target region. The vacuum chamber also includes a beam shaping apparatus arranged upstream of the superposition apparatus in the beam path of the second laser beam, wherein the beam shaping apparatus is configured to set a ring-shaped beam profile of the second laser beam, The first and second laser beam have different wavelengths.

Abstract: In one implementation, a beam guiding apparatus includes a vacuum chamber that includes a target region arranged to receive a target material for generating EUV radiation. The vacuum chamber further includes a first opening for receiving into the vacuum chamber a first laser beam and a second opening for receiving into the vacuum chamber a second laser beam. The vacuum chamber also includes a superposition apparatus arranged to superpose the first laser beam having a first wavelength and a second laser beam having a second wavelength for common beam guidance in the direction of the target region. The vacuum chamber also includes a beam shaping apparatus arranged upstream of the superposition apparatus in the beam path of the second laser beam, wherein the beam shaping apparatus is configured to set a ring-shaped beam profile of the second laser beam, The first and second laser beam have different wavelengths.

Abstract: A valve-actuating lever for reciprocating-piston internal combustion engines is proposed, wherein this lever is supported on a cylinder head of the internal combustion engine or a part of this cylinder head, is in active connection with a cam of a camshaft, has an essentially inverted U-shaped cross section, is made from steel sheet metal by a punching, bending, and/or deep-drawing measure, and has, in addition to a support plate (5) for a shaft of a gas-exchange valve or for an intermediate piece, lateral guide cheeks (3, 4). A height of the lateral guide cheeks (3, 4) can be changed with regard to the support plate (5) by an embossing procedure.

Abstract: An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.

Abstract: The invention relates to an optical arrangement comprising an optical module having a first carrier body to which there are attached at least one optical element and a plurality of first mounting elements, and a housing having a second carrier body for at least one further optical element, wherein a plurality of second mounting elements is attached to the carrier body. Also comprised is a movement device for displacing the first carrier body relative to the second carrier body in a movement direction between a removal position from which the optical module can be removed from the housing and a mounting position in which the movement device presses the first mounting elements against the second mounting elements. The invention relates also to an optical module and to a method for correctly positioning an optical module in a housing.