Patents by Inventor Martin Liphardt

Martin Liphardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for and method of investigating the exact same point on a sample substrate with multiple wavelengths
    Publication number: 20070097373
    Abstract: Disclosed are system for and method of analyzing a sample at substantially the exact same small spot point on a sample with a plurality of wavelengths.
    Type: Application
    Filed: December 12, 2006
    Publication date: May 3, 2007
    Inventors: Galen Pfeiffer, Martin Liphardt, Blaine Johs, Craig Herzinger, Christopher Goeden, Ping He, John Woollam, James Welch
  • Combined spatial filter and relay systems
    Publication number: 20060268271
    Abstract: Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.
    Type: Application
    Filed: March 22, 2005
    Publication date: November 30, 2006
    Inventors: Martin Liphardt, Ping He
  • Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
    Publication number: 20060268272
    Abstract: Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
    Type: Application
    Filed: November 22, 2005
    Publication date: November 30, 2006
    Inventors: Martin Liphardt, Blaine Johs, Jeffrey Hale, Craig Herzinger, Steven Green, Ping He, John Woollam