Patents by Inventor Martin Mahlmann
Martin Mahlmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20190121238Abstract: The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.Type: ApplicationFiled: October 18, 2018Publication date: April 25, 2019Inventors: Benjamin Sigel, Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber
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Publication number: 20180259856Abstract: An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.Type: ApplicationFiled: February 8, 2018Publication date: September 13, 2018Inventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Patent number: 9891535Abstract: An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.Type: GrantFiled: January 23, 2017Date of Patent: February 13, 2018Assignee: Carl Zeiss SMT GmbHInventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Publication number: 20170219929Abstract: An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.Type: ApplicationFiled: January 23, 2017Publication date: August 3, 2017Inventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Patent number: 9557653Abstract: An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.Type: GrantFiled: July 7, 2015Date of Patent: January 31, 2017Assignee: Carl Zeiss SMT GmbHInventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Publication number: 20150323873Abstract: An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.Type: ApplicationFiled: July 7, 2015Publication date: November 12, 2015Inventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Publication number: 20150316855Abstract: The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.Type: ApplicationFiled: April 9, 2015Publication date: November 5, 2015Inventors: Benjamin Sigel, Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber
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Patent number: 9104016Abstract: An optical projection system for a microlithography system includes a light path, a first lens unit receiving a first part of the light path, a second lens unit receiving a second part of the light path, and a support unit supporting the first and second lens units. The first and second lens units are elongated lens units including a plurality of lenses. The support unit includes a housing receiving a third part of the light path and enclosing a reflective element. The housing includes first and second interfaces. The first interface is a first support interface supporting the first lens unit. The second interface is a second support interface supporting the second lens unit at a location substantially opposite to the first interface.Type: GrantFiled: September 25, 2012Date of Patent: August 11, 2015Assignee: Carl Zeiss SMT GmbHInventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Patent number: 9030644Abstract: The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.Type: GrantFiled: August 2, 2011Date of Patent: May 12, 2015Assignee: Carl Zeiss SMT GmbHInventors: Benjamin Sigel, Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber
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Patent number: 8300210Abstract: An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.Type: GrantFiled: October 1, 2005Date of Patent: October 30, 2012Assignee: Carl Zeiss SMT GmbHInventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Publication number: 20110317140Abstract: The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.Type: ApplicationFiled: August 2, 2011Publication date: December 29, 2011Applicant: Carl Zeiss SMT GmbHInventors: Benjamin Sigel, Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber
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Publication number: 20090174874Abstract: An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.Type: ApplicationFiled: October 1, 2005Publication date: July 9, 2009Inventors: Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann, Bernhard Geuppert, Thomas Petasch, Gerhard Fuerter
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Patent number: 7548387Abstract: An optical imaging device (1a) has at least one optical element (2) which is provided with an outer frame (1), an inner ring (4) in which the optical element (2) is mounted, and a manipulator instrument having at least one actuator. Contactless linkage of the inner ring (4) to the outer frame (1) is provided in at least one degree of freedom by means of a support (5) arranged between the inner ring (4) and the outer frame (1). The manipulator instrument has at least one actuator (8), the setting forces and/or bearing forces of which act contactlessly on the inner ring (4), for mounting and/or positioning and/or manipulating the inner ring (4) relative to the outer frame (1).Type: GrantFiled: April 6, 2006Date of Patent: June 16, 2009Assignee: Carl Zeiss SMT AGInventors: Thorsten Rassel, Erich Merz, Martin Mahlmann
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Patent number: 7265919Abstract: A flange assembly of an optical system has a first flange, a compensation element and a second flange. The flanges and the compensation element are substantially axially symmetric both flanges (2, 2?) being suitable for being connected to other components of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges consist of different materials with different coefficients of linear thermal expansion. The compensation element is radially soft, but connects the two flanges rigidly in their relative spatial position.Type: GrantFiled: November 10, 2004Date of Patent: September 4, 2007Assignee: Carl Zeiss SMT AGInventors: Johannes Rau, Martin Mahlmann
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Publication number: 20060230413Abstract: An optical imaging device (1a) has at least one optical element (2) which is provided with an outer frame (1), an inner ring (4) in which the optical element (2) is mounted, and a manipulator instrument having at least one actuator. Contactless linkage of the inner ring (4) to the outer frame (1) is provided in at least one degree of freedom by means of a support (5) arranged between the inner ring (4) and the outer frame (1). The manipulator instrument has at least one actuator (8), the setting forces and/or bearing forces of which act contactlessly on the inner ring (4), for mounting and/or positioning and/or manipulating the inner ring (4) relative to the outer frame (1).Type: ApplicationFiled: April 6, 2006Publication date: October 12, 2006Inventors: Thorsten Rassel, Erich Merz, Martin Mahlmann
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Publication number: 20050099704Abstract: A flange assembly (1) of an optical system has a first flange (2), a compensation element (4) and a second flange (2?). The flanges (2, 2?) and the compensation element (4) are substantially axially symmetric both flanges (2, 2?) being suitable for being connected to other components (10, 11) of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges (2, 2?) consist of different materials with different coefficients of linear thermal expansion. The compensation element (4) is radially soft, but connects the two flanges (2, 2?) rigidly in their relative spatial position.Type: ApplicationFiled: November 10, 2004Publication date: May 12, 2005Inventors: Johannes Rau, Martin Mahlmann