Patents by Inventor Martin Mayo

Martin Mayo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof
    Patent number: 11454894
    Abstract: A method and system for measuring misregistration between different layers of a semiconductor device, the method including providing a set of pupil inaccuracy scalable basis elements (PISBEs) relating to a plurality of patterned semiconductor device wafers (PSDWs), generating a single pupil image of a site on a PSDW, the PSDW being one of the plurality of PSDWs, by taking a single measurement of the site, the single pupil image including a plurality of site-specific pixels, calculating a set of site-specific pupil inaccuracy scalable basis element scaling factors (PISBESFs) for the single pupil image using the set of PISBEs and the plurality of site-specific pixels and calculating a site-specific misregistration value (SSMV) using the set of PISBEs and the set of site-specific PISBESFs.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: September 27, 2022
    Assignee: KLA Corporation
    Inventors: Alon Yagil, Yuval Lamhot, Ohad Bachar, Martin Mayo, Tal Yaziv, Roie Volkovich
  • SYSTEMS AND METHODS FOR SCATTEROMETRIC SINGLE-WAVELENGTH MEASUREMENT OF MISREGISTRATION AND AMELIORATION THEREOF
    Publication number: 20220082950
    Abstract: A method and system for measuring misregistration between different layers of a semiconductor device, the method including providing a set of pupil inaccuracy scalable basis elements (PISBEs) relating to a plurality of patterned semiconductor device wafers (PSDWs), generating a single pupil image of a site on a PSDW, the PSDW being one of the plurality of PSDWs, by taking a single measurement of the site, the single pupil image including a plurality of site-specific pixels, calculating a set of site-specific pupil inaccuracy scalable basis element scaling factors (PISBESFs) for the single pupil image using the set of PISBEs and the plurality of site-specific pixels and calculating a site-specific misregistration value (SSMV) using the set of PISBEs and the set of site-specific PISBESFs.
    Type: Application
    Filed: January 28, 2021
    Publication date: March 17, 2022
    Inventors: Alon Yagil, Yuval Lamhot, Ohad Bachar, Martin Mayo, Tal Yaziv, Roie Volkovich