Patents by Inventor Martin Meier
Martin Meier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9507269Abstract: An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror device, which is disposed downstream of the polarization mirror device reflects an illumination light beam. At least one drive device is operatively connected to at least one of the two mirror devices. The two mirror devices are displaceable relative to one another via the drive device between a first relative position, which leads to a first beam geometry of the illumination light beam after reflection at the second mirror device, and a second relative position, which leads to a second beam geometry of the illumination light beam after reflection at the second mirror device, which is different from the first beam geometry. This results in a flexible predefinition of different illumination geometries, in particular of different illumination geometries with rotationally symmetrical illumination.Type: GrantFiled: December 19, 2013Date of Patent: November 29, 2016Assignee: Carl Zeiss SMT GmbHInventors: Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener
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Patent number: 9500956Abstract: The disclosure relates to optical systems of a microlithographic projection exposure apparatus, and to a microlithographic exposure method. According to an aspect of the disclosure, an optical system has a light source, a ray-splitting optical element, which splits a light ray incident on this element when the projection exposure apparatus is in operation into a first partial ray and a second partial ray, with the first and the second partial ray having mutually orthogonal polarization directions, and at least one ray-deflecting optical element for generating a desired polarized illumination setting from the first partial ray and the second partial ray, wherein the ray-splitting optical element is arranged such that light incident on this ray-splitting optical element when the projection exposure apparatus is in operation has a degree of polarization of less than one.Type: GrantFiled: December 30, 2013Date of Patent: November 22, 2016Assignee: Carl Zeiss SMT GmbHInventors: Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes
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Patent number: 9487341Abstract: An apparatus for dispensing flowable substances, having a nozzle having an exit opening for dispensing the substances from the nozzle, and a closure part movable by a control element, disposed outside of the nozzle, and configured to release the exit opening and close the exit opening, in the region of a closure part surface that faces the nozzle end. The closure part surface is delimited, in the movement direction of the closure part from the open position to the closed position, by a leading edge, in the leading direction. The closure part surface is disposed next to the nozzle and at a level upstream from the exit opening, with reference to the flow direction of the substances through the nozzle, in the open position. The closure part can be moved from the open position to the closed position by the control element, such that the leading edge of the closure part surface is moved past the free nozzle end.Type: GrantFiled: August 6, 2014Date of Patent: November 8, 2016Assignee: ROBATECH AGInventors: Beatus Ineichen, Martin Meier
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Patent number: 9441758Abstract: A valve device including a valve housing which bounds a valve chamber in which a valve member is accommodated for movement between a blocking position and a release position in order to influence a free flow cross-section for a fluid in a flow path between an inlet passage terminating into the valve chamber and an outlet passage leading from the valve chamber, further including a first absolute pressure sensor for providing a first pressure signal as a function of an operating pressure in the flow path, and further including an evaluation circuit for processing the first pressure signal. It is provided that a second absolute pressure sensor is located outside the flow path, which is designed to provide a second pressure signal as a function of an operating pressure outside the flow path and which is connected to the evaluation circuit for enabling a differential pressure between the first and second pressure signals to be determined.Type: GrantFiled: December 5, 2013Date of Patent: September 13, 2016Assignee: FESTO AG & CO. KGInventors: Martin Maichl, Martin Meier, Andreas Dickhoff
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Patent number: 9394097Abstract: An apparatus for dispensing flowable substances, having a nozzle having an exit opening for dispensing the substances from the nozzle in the region of a free nozzle end, and a closure part that can be moved by means of a control element, disposed outside of the nozzle. The closure part releases the exit opening in an open position and closes the exit opening in a closed position. The control element has a frame, a transfer medium that brings about shape fit and has wheels, the transfer medium generates angle synchronicity of wheels mounted in the frame so as to pivot, a drive for the transfer medium, for pivoting the respective wheel in two opposite pivot directions, a bearing element for the closure part, mounted in wheels so as to pivot. The bearing element is mounted about pivot axles in the wheels, so as to pivot. The pivot axles are disposed in the frame parallel to the pivot axles of these wheels. The closure part is mounted in the bearing element.Type: GrantFiled: August 6, 2014Date of Patent: July 19, 2016Assignee: ROBATECH AGInventors: Beatus Ineichen, Martin Meier
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Patent number: 9057015Abstract: The present invention relates to an aqueous preparation comprising a fluorescent dyestuff of a specific formula, water, and optionally a dispersing agent, and the use of the aqueous preparation for dyeing cellulose- or polyamide-containing materials.Type: GrantFiled: June 15, 2011Date of Patent: June 16, 2015Assignee: Kemira Germany GmbHInventor: Helmut-Martin Meier
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Patent number: 9023118Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: GrantFiled: November 29, 2011Date of Patent: May 5, 2015Assignee: Kemira OYJInventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Publication number: 20150041501Abstract: An apparatus for dispensing flowable substances, having a nozzle having an exit opening for dispensing the substances from the nozzle, and a closure part movable by a control element, disposed outside of the nozzle, and configured to release the exit opening and close the exit opening, in the region of a closure part surface that faces the nozzle end. The closure part surface is delimited, in the movement direction of the closure part from the open position to the closed position, by a leading edge, in the leading direction. The closure part surface is disposed next to the nozzle and at a level upstream from the exit opening, with reference to the flow direction of the substances through the nozzle, in the open position. The closure part can be moved from the open position to the closed position by the control element, such that the leading edge of the closure part surface is moved past the free nozzle end.Type: ApplicationFiled: August 6, 2014Publication date: February 12, 2015Inventors: Beatus lneichen, Martin Meier
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Publication number: 20150041502Abstract: An apparatus for dispensing flowable substances, having a nozzle having an exit opening for dispensing the substances from the nozzle in the region of a free nozzle end, and a closure part that can be moved by means of a control element, disposed outside of the nozzle. The closure part releases the exit opening in an open position and closes the exit opening in a closed position. The control element has a frame, a transfer medium that brings about shape fit and has wheels, the transfer medium generates angle synchronicity of wheels mounted in the frame so as to pivot, a drive for the transfer medium, for pivoting the respective wheel in two opposite pivot directions, a bearing element for the closure part, mounted in wheels so as to pivot. The bearing element is mounted about pivot axles in the wheels, so as to pivot. The pivot axles are disposed in the frame parallel to the pivot axles of these wheels. The closure part is mounted in the bearing element.Type: ApplicationFiled: August 6, 2014Publication date: February 12, 2015Inventors: Beatus lneichen, Martin Meier
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Publication number: 20140192339Abstract: A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.Type: ApplicationFiled: March 14, 2014Publication date: July 10, 2014Inventors: Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes, Wolfgang Singer
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Publication number: 20140158215Abstract: A valve device including a valve housing which bounds a valve chamber in which a valve member is accommodated for movement between a blocking position and a release position in order to influence a free flow cross-section for a fluid in a flow path between an inlet passage terminating into the valve chamber and an outlet passage leading from the valve chamber, further including a first absolute pressure sensor for providing a first pressure signal as a function of an operating pressure in the flow path, and further including an evaluation circuit for processing the first pressure signal. It is provided that a second absolute pressure sensor is located outside the flow path, which is designed to provide a second pressure signal as a function of an operating pressure outside the flow path and which is connected to the evaluation circuit for enabling a differential pressure between the first and second pressure signals to be determined.Type: ApplicationFiled: December 5, 2013Publication date: June 12, 2014Applicant: FESTO AG & Co. KGInventors: Martin Maichl, Martin Meier, Andreas Dickhoff
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Patent number: 8734532Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: GrantFiled: November 29, 2011Date of Patent: May 27, 2014Assignee: Kemira OyjInventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Patent number: 8734534Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: GrantFiled: November 29, 2011Date of Patent: May 27, 2014Assignee: Kemira OyjInventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Publication number: 20140132942Abstract: The disclosure relates to optical systems of a microlithographic projection exposure apparatus, and to a microlithographic exposure method. According to an aspect of the disclosure, an optical system has a light source, a ray-splitting optical element, which splits a light ray incident on this element when the projection exposure apparatus is in operation into a first partial ray and a second partial ray, with the first and the second partial ray having mutually orthogonal polarization directions, and at least one ray-deflecting optical element for generating a desired polarized illumination setting from the first partial ray and the second partial ray, wherein the ray-splitting optical element is arranged such that light incident on this ray-splitting optical element when the projection exposure apparatus is in operation has a degree of polarization of less than one.Type: ApplicationFiled: December 30, 2013Publication date: May 15, 2014Inventors: Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes
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Publication number: 20140111785Abstract: An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror device, which is disposed downstream of the polarization mirror device reflects an illumination light beam. At least one drive device is operatively connected to at least one of the two mirror devices. The two mirror devices are displaceable relative to one another via the drive device between a first relative position, which leads to a first beam geometry of the illumination light beam after reflection at the second mirror device, and a second relative position, which leads to a second beam geometry of the illumination light beam after reflection at the second mirror device, which is different from the first beam geometry. This results in a flexible predefinition of different illumination geometries, in particular of different illumination geometries with rotationally symmetrical illumination.Type: ApplicationFiled: December 19, 2013Publication date: April 24, 2014Inventors: Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener
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Patent number: 8645990Abstract: Subscribers request programs from a network based content server and view the requested programs via their customer equipment. The content server receives various programs and breaks the program content for each program into a sequence of program segments, which are logically linked by program association indicia. The content server also receives advertisements and stores the advertisements as advertising segments, which generally contain at least one complete advertisement, but the invention is not limited thereto. Upon receiving a program request from a subscriber, the content server will identify advertising segments to provide along with the program segments for the requested program, and where to place the advertising segments among the program segments.Type: GrantFiled: December 22, 2006Date of Patent: February 4, 2014Assignee: Ciena CorporationInventors: Martin Jan Soukup, Dominic Goodwill, Martin Meier
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Publication number: 20130269124Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: ApplicationFiled: November 29, 2011Publication date: October 17, 2013Inventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Publication number: 20130255006Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: ApplicationFiled: November 29, 2011Publication date: October 3, 2013Inventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Publication number: 20130255007Abstract: The present invention relates to new azo dyes, a process for their preparation, and their use for dyeing or printing fibrous materials, to produce materials with brownish shades.Type: ApplicationFiled: November 29, 2011Publication date: October 3, 2013Inventors: Helmut-Martin Meier, Christof Heide, Klaus-Günter Strumpf, Thomas Hübbe
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Patent number: D752210Type: GrantFiled: August 27, 2014Date of Patent: March 22, 2016Assignee: Merck Sharp & Dohme Corp.Inventors: Angela M. Amend Kwasnik, Benjamin R. Bartfeld, Peter Basile, Jeffrey C. Givand, Philip G. Green, Sharad Gupta, Christin L. O'Neill, Steven Carl Persak, Robert Stianchi, Ari Tao Adler, Florian Altmann, Thomas Junk, Florian Kössler, Martin Meier, Scott R. Mackie, Pernilla Danielsson