Abstract: A vacuum valve is provided having a valve housing (1) which has a vacuum region (4) in the interior, a closure unit (5) which is arranged in the vacuum region (4) of the valve housing (1) and by which at least one valve opening (2, 3) is closable in a closed state of the vacuum valve, a longitudinal drive (11) by which the closure unit (5) is adjustable in a longitudinal direction (10) for adjusting the closure unit (5) between a position opening up the valve opening (2, 3) and a position covering the valve opening (2, 3). A longitudinal guide (19) for the displaceable guiding of the closure unit (5) parallel to the longitudinal direction (10) is provided, with this longitudinal guide having a guide rod (20) extending parallel to the longitudinal direction (10), and at least one guide part (21). At least one bearing element (36) of the guide part (21) is arranged in a region sealed off from the vacuum region (4) of the valve housing (1).

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Abstract: A closure device (1) for an opening (2) in a chamber wall (3) is provided, wherein the closure device (1) has at least one closure element (4) and at least one closure element carrier body (5) and at least one yoke (6). The closure element (4) is fixedly connected to the yoke (6) by the closure element carrier body (5), wherein the yoke (6) is mounted in a housing (9) of the closure device (1) in such a way that the yoke can be slid by at least one cylinder-piston drive unit (7) of the closure device (1), in particular parallel to a longitudinal extent (8) of the closure element carrier body (5). The yoke (6) has at least one cylinder cavity (10) of the cylinder-piston drive unit (7) and/or at least one guide element receptacle (11) for guiding a guide element (12) of the closure device (1).

Abstract: A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (ES), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (ET), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where ES and ET enclose a defined angle (?), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Abstract: A vacuum valve is provided having a valve housing (1) which has a vacuum region (4) in the interior, a closure unit (5) which is arranged in the vacuum region (4) of the valve housing (1) and by which at least one valve opening (2, 3) is closable in a closed state of the vacuum valve, a longitudinal drive (11) by which the closure unit (5) is adjustable in a longitudinal direction (10) for adjusting the closure unit (5) between a position opening up the valve opening (2, 3) and a position covering the valve opening (2, 3). A longitudinal guide (19) for the displaceable guiding of the closure unit (5) parallel to the longitudinal direction (10) is provided, with this longitudinal guide having a guide rod (20) extending parallel to the longitudinal direction (10), and at least one guide part (21). At least one bearing element (36) of the guide part (21) is arranged in a region sealed off from the vacuum region (4) of the valve housing (1).

Abstract: The vacuum valve includes a valve housing (1) with an interior (2), first and second valve openings (3, 4), and a closure unit (10) that is arranged in the interior (2) of the valve housing (1) and has a first plate (11), a second plate (12), a roller support (13) which is arranged between the first plate (11) and the second plate (12), multiple roller pairs, each of which is formed from a first spreading roller (14) and a second spreading roller (15), and at least one spring (30, 31). The first and the second plate (11, 12) are carried together with the roller support (13) when the roller support (13) moves parallel to a movement direction (16) from the open position into an intermediate position, and an additional movement of the first and the second plate (11, 12) in the movement direction (16) is blocked when the roller support (13) moves from the intermediate position into a closed position.

Abstract: A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).

Abstract: A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (ES), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (ET), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where ES and ET enclose a defined angle (?), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Abstract: A valve rod (12) for a vacuum valve, the plunger having a first connection region (40) for a closure member (5) of the vacuum valve and at least one second connection region (41) for a valve drive of the vacuum valve. At least some sections of the valve rod (12) have a material (42) with an elastic modulus of at least 250 gigapascal, preferably at least 350 gigapascal.

Abstract: A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).