Abstract: In a method for operating a system, which has a plurality of sensors (21, 22, 23), the sensors (21, 22, 23) provide first sensor data (11) to a primary process (31). Furthermore, the sensors (21, 22, 23) provide second sensor data (12). At least a part of the first sensor data (11) and the second sensor data (12) is subjected to an analysis (13). A result (16) of the analysis (13) is used in at least one secondary process (33) of the primary process (31).

Abstract: The at least one value is respectively determined from at least one measured value of the sensors (20-29) in a method for determining at least one physical value in a space (10) in which several sensors (20-29) are arranged which are set up to measurer the at least one value, for several positions (30) in the space (10) where there is no sensor (20-29). A system which is set up in order to determine the at least one physical value in the space (10) has several sensors (20-29) which are arranged in the space (10). Furthermore, it has a database, in which information about the space (10) is stored, and a computer which is set up in order to determine the at least one value by means of the method.

Abstract: In a method for operating a system, which has a plurality of sensors (21, 22, 23), the sensors (21, 22, 23) provide first sensor data (11) to a primary process (31). Furthermore, the sensors (21, 22, 23) provide second sensor data (12). At least a part of the first sensor data (11) and the second sensor data (12) is subjected to an analysis (13). A result (16) of the analysis (13) is used in at least one secondary process (33) of the primary process (31).

Abstract: The at least one value is respectively determined from at least one measured value of the sensors (20-29) in a method for determining at least one physical value in a space (10) in which several sensors (20-29) are arranged which are set up to measurer the at least one value, for several positions (30) in the space (10) where there is no sensor (20-29). A system which is set up in order to determine the at least one physical value in the space (10) has several sensors (20-29) which are arranged in the space (10). Furthermore, it has a database, in which information about the space (10) is stored, and a computer which is set up in order to determine the at least one value by means of the method.

Abstract: The invention relates to a method for operating a distance sensor (10). In the method, a transmission signal (S1) is radiated as transmission radiation (S2), reflected as reflection radiation (S3) by an object (16), the distance (D) of which is to be measured, and received as a reflection signal (S4). The reflection signal (S4) present at a receiver input (28) and a reference signal likewise occurring at the receiver input (28) are controlled to a specified ratio, the distance (D) being determined during the adjusting process. The invention further relates to devices for performing the method. The method is characterized in that microwaves are used as the transmission radiation (S2) and a cross-talk signal (S5, S6) from the transmission signal (S1) directly to the receiver input (28) with suppressed radiation of the transmission signal (S1) is used as the reference signal.

Abstract: A method for operation of a distance sensor emits a transmission signal as transmission radiation, reflected by an object, the distance of which is to be measured, as reflection radiation, and received as a reflection signal. The reflection signal and a reference signal that occur at a receiver input are regulated to a predetermined ratio. The distance is determined during the regulation process. An auxiliary transmission antenna emits an auxiliary transmission signal as auxiliary measurement radiation, directly toward a reception antenna. Microwaves are used as the transmission and auxiliary transmission signals. The reception antenna receives the reflection radiation reflected by the object and passes it on to the receiver input as a reflection signal. The reception antenna receives the auxiliary measurement radiation directly and passes it on to the receiver input as an auxiliary reception signal which is evaluated as a reference signal when measurement radiation emission is suppressed.

Abstract: The invention relates to a method for operating a distance sensor (10). In the method, a transmission signal (S1) is radiated as transmission radiation (S2), reflected as reflection radiation (S3) by an object (16), the distance (D) of which is to be measured, and received as a reflection signal (S4). The reflection signal (S4) present at a receiver input (28) and a reference signal likewise occurring at the receiver input (28) are controlled to a specified ratio, the distance (D) being determined during the adjusting process. The invention further relates to devices for performing the method. The method is characterized in that microwaves are used as the transmission radiation (S2) and a cross-talk signal (S5, S6) from the transmission signal (S1) directly to the receiver input (28) with suppressed radiation of the transmission signal (S1) is used as the reference signal.

Abstract: A method for operation of a distance sensor emits a transmission signal as transmission radiation, reflected by an object, the distance of which is to be measured, as reflection radiation, and received as a reflection signal. The reflection signal and a reference signal that occur at a receiver input are regulated to a predetermined ratio. The distance is determined during the regulation process. An auxiliary transmission antenna emits an auxiliary transmission signal as auxiliary measurement radiation, directly toward a reception antenna. Microwaves are used as the transmission and auxiliary transmission signals. The reception antenna receives the reflection radiation reflected by the object and passes it on to the receiver input as a reflection signal. The reception antenna receives the auxiliary measurement radiation directly and passes it on to the receiver input as an auxiliary reception signal which is evaluated as a reference signal when measurement radiation emission is suppressed.

Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Abstract: An illumination device for a DUV microscope has an illumination beam path, proceeding from a DUV light source in which are arranged a condenser and a reflection filter system which generates a DUV wavelength band and comprises four reflection filters. At these, the illumination beam is reflected in each case at the same reflection angle &agr;, the illumination beam path extending coaxially in front of and behind the reflection filter system. According to the present invention, the reflection angle &agr;=30° and the DUV wavelength band &lgr;DUV+&Dgr;&lgr; has a half-value width of max. 20 nm and a peak with a maximum value S of more than 90% of the incoming light intensity. The resulting very narrow half-value width of the DUV wavelength band makes it possible for the DUV objectives of the DUV microscope to be very well-corrected.

Abstract: An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

Abstract: The invention pertains to an angle of rotation sensor, wherein a magnet that is arranged such that it can be turned relative to a sensor that is sensitive to magnetic fields is coupled with a rotatable body, the angle of rotation (&agr;) of which needs to be measured. The invention aims to significantly broaden the measuring range of such an angle of rotation sensor. The invention proposes to utilize an asymmetric magnetic field such that the maximum and the minimum of the magnetic field measured by the probe are spaced apart by an angular range in excess of 270°. Advantageous additional developments pertain to other options for adapting the magnetic field to the desired shape. These options include an air gap that changes over the angle of rotation and the utilization of asymmetric pole shoes.

Abstract: A device for monitoring the state of a window pane includes an optical emitter which emits a light beam on to the window pane. The device also contains an optical receiver which detects light of the light beam modulated by the window pane and, as a result, generates a received signal. The emitter and the receiver are arranged at a distance from the window pane. An evaluation circuit evaluates the received signal in order to determine the state of the window pane.

Abstract: A process for determining the distance between a distance sensor and an object, wherein an analog input signal is directed to a transmitter of the distance sensor. The transmitter emits a wave which is reflected by the object. A receiver of the distance sensor receives the reflected wave and thereupon emits an analog output signal whose level is dependent upon the distance and/or the type of object. The output signal is amplified by a subsequently added amplifier. The amplifier signal is directed to an analog/digital converter and is converted into a digital signal. The digital signal is directed to an evaluation circuit for the computation of a distance value. The signal amplification of the amplifier is controlled in an adaptively dependent manner on the level of the output signal and/or in a manner dependent on the signal value of an amplification signal made available by the evaluation circuit which is characteristic of an anticipated distance range.