Patents by Inventor Martin Pilz

Martin Pilz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Insitu tool health and recipe quality monitoring on a CDSEM
    Patent number: 10185312
    Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: January 22, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich, Martin Pilz
  • INSITU TOOL HEALTH AND RECIPE QUALITY MONITORING ON A CDSEM
    Publication number: 20180217584
    Abstract: Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.
    Type: Application
    Filed: January 31, 2017
    Publication date: August 2, 2018
    Inventors: Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich, Martin Pilz
  • Pressure control valve
    Patent number: 8752805
    Abstract: A pressure control valve includes a housing, a valve slide guided in the housing, on which at least one inflow control edge is configured, which cooperates with an inflow opening in the housing, a constriction in piston being present adjacent to inflow control edge, which lies at least approximately opposite to a control opening. It is provided that the valve slide have a circumferential annular groove, which lies on the side of the inflow control edge facing away from the constriction and approximately opposite the inflow opening.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: June 17, 2014
    Assignee: Robert Bosch GmbH
    Inventors: Martin Pilz, Benjin Luo, Mehmet-Fatih Sen, Frank Wauro, David Jayanth
  • pressure control valve
    Publication number: 20120186678
    Abstract: A pressure control valve includes a housing, a valve slide guided in the housing, on which at least one inflow control edge is configured, which cooperates with an inflow opening in the housing, a constriction in piston being present adjacent to inflow control edge, which lies at least approximately opposite to a control opening. It is provided that the valve slide have a circumferential annular groove, which lies on the side of the inflow control edge facing away from the constriction and approximately opposite the inflow opening.
    Type: Application
    Filed: June 10, 2010
    Publication date: July 26, 2012
    Inventors: Martin Pilz, Benjin Luo, Mehmet-Fatih Sen, Frank Wauro, David Jayanth
  • SLIDE VALVE FOR HYDRAULIC CONTROL IN A MOTOR VEHICLE AUTOMATIC TRANSMISSION
    Publication number: 20100084589
    Abstract: A slide valve is used for controlling the hydraulic system in a motor vehicle automatic transmission. It includes a housing, a valve slide that is guided in the housing, which has a plurality of adjacent sections having different diameters. Furthermore, an electromagnetic operating device is provided, which is able to impinge upon the valve slide at least in a first effective direction. An impingement device impinges upon the valve slide counter to the first effective direction.
    Type: Application
    Filed: October 5, 2009
    Publication date: April 8, 2010
    Inventors: Mehmet-Fatih SEN, Andrzej Pilawski, Klaus Schudt, Martin Pilz, Guenther Krehl, Dirk Kube, Christof Ott