Patents by Inventor Martin Portka

Martin Portka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputter devices and methods
    Patent number: 11274364
    Abstract: Sputter devices comprise a vacuum supply, a gas supply, a substrate holding device, and sputter sources. Each sputter source is held by an individual source support, each of which has an individual reference point allocated on a sputter surface facing the deposition area, and each of which has a source distance to a source reference surface from the individual reference point. The sputter sources are spaced apart from each other, are arranged as a two-dimensional array opposite the deposition area, and extend along the source reference surface. The source reference surface is parallel to the substrate reference surface. At least one of the sputter sources has a source distance deviating from zero.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: March 15, 2022
    Assignee: Solayer GmbH
    Inventors: Martin Portka, Markus Kress, Michael Geisler, Florian Peter Schwarz
  • SPUTTER DEVICES AND METHODS
    Publication number: 20190003039
    Abstract: Sputter devices comprise a vacuum supply, a gas supply, a substrate holding device, and sputter sources. Each sputter source is held by an individual source support, each of which has an individual reference point allocated on a sputter surface facing the deposition area, and each of which has a source distance to a source reference surface from the individual reference point. The sputter sources are spaced apart from each other, are arranged as a two-dimensional array opposite the deposition area, and extend along the source reference surface. The source reference surface is parallel to the substrate reference surface. At least one of the sputter sources has a source distance deviating from zero.
    Type: Application
    Filed: June 27, 2018
    Publication date: January 3, 2019
    Inventors: Martin Portka, Markus Kress, Michael Geisler, Florian Peter Schwarz