Patents by Inventor Martin Robert Maraschin

Martin Robert Maraschin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Buffer station with single exit-flow direction
    Patent number: 10297480
    Abstract: A buffer for use in semiconductor processing tools is disclosed. The buffer may be used to temporarily store wafers after processing operations are performed on those wafers. The buffer may include two side walls and a back wall interposed between the side walls. The side walls and the back wall may generally define an area within which the wafers may be stored in a stacked arrangement. Wafer support fins extending from the side walls and the back wall may extend into a wafer support region that overlaps with the edges of the wafers. Purge gas may be introduced in between each pair of wafers via purge gas ports located in one of the walls.
    Type: Grant
    Filed: January 19, 2018
    Date of Patent: May 21, 2019
    Assignee: Lam Research Corporation
    Inventors: Martin Robert Maraschin, Richard Howard Gould, Derek John Witkowicki
  • BUFFER STATION WITH SINGLE EXIT-FLOW DIRECTION
    Publication number: 20180144965
    Abstract: A buffer for use in semiconductor processing tools is disclosed. The buffer may be used to temporarily store wafers after processing operations are performed on those wafers. The buffer may include two side walls and a back wall interposed between the side walls. The side walls and the back wall may generally define an area within which the wafers may be stored in a stacked arrangement. Wafer support fins extending from the side walls and the back wall may extend into a wafer support region that overlaps with the edges of the wafers. Purge gas may be introduced in between each pair of wafers via purge gas ports located in one of the walls.
    Type: Application
    Filed: January 19, 2018
    Publication date: May 24, 2018
    Inventors: Martin Robert Maraschin, Richard Howard Gould, Derek John Witkowicki
  • Buffer station with single exit-flow direction
    Patent number: 9881826
    Abstract: A buffer for use in semiconductor processing tools is disclosed. The buffer may be used to temporarily store wafers after processing operations are performed on those wafers. The buffer may include two side walls and a back wall interposed between the side walls. The side walls and the back wall may generally define an area within which the wafers may be stored in a stacked arrangement. Wafer support fins extending from the side walls and the back wall may extend into a wafer support region that overlaps with the edges of the wafers. Purge gas may be introduced in between each pair of wafers via purge gas ports located in one of the walls.
    Type: Grant
    Filed: October 24, 2014
    Date of Patent: January 30, 2018
    Assignee: Lam Research Corporation
    Inventors: Martin Robert Maraschin, Richard Howard Gould, Derek John Witkowicki
  • BUFFER STATION WITH SINGLE EXIT-FLOW DIRECTION
    Publication number: 20160118282
    Abstract: A buffer for use in semiconductor processing tools is disclosed. The buffer may be used to temporarily store wafers after processing operations are performed on those wafers. The buffer may include two side walls and a back wall interposed between the side walls. The side walls and the back wall may generally define an area within which the wafers may be stored in a stacked arrangement. Wafer support fins extending from the side walls and the back wall may extend into a wafer support region that overlaps with the edges of the wafers. Purge gas may be introduced in between each pair of wafers via purge gas ports located in one of the walls.
    Type: Application
    Filed: October 24, 2014
    Publication date: April 28, 2016
    Inventors: Martin Robert Maraschin, Richard Howard Gould, Derek John Witkowicki