Patents by Inventor Martin ROECKL

Martin ROECKL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas distributor for a Siemens reactor
    Patent number: 10525426
    Abstract: A gas distribution system for a polysilicon deposition reactor eliminates or mitigates the problems associated with prior art distribution systems employs at least two segments which are gas-tightly connected to one another by readily detachable fasteners, with at least one gas inlet opening and one gas outlet opening, the gas distributor of the system being mounted by readily detachable fasteners to the polysilicon reactor.
    Type: Grant
    Filed: March 19, 2014
    Date of Patent: January 7, 2020
    Assignee: Wacker Chemie AG
    Inventors: Friedrich Popp, Christian Kutza, Martin Roeckl, Tobias Weiss
  • GAS DISTRIBUTOR FOR A SIEMENS REACTOR
    Publication number: 20160067663
    Abstract: A gas distribution system for a polysilicon deposition reactor eliminates or mitigates the problems associated with prior art distribution systems employs at least two segments which are gas-tightly connected to one another by readily detachable fasteners, with at least one gas inlet opening and one gas outlet opening, the gas distributor of the system being mounted by readily detachable fasteners to the polysilicon reactor.
    Type: Application
    Filed: March 19, 2014
    Publication date: March 10, 2016
    Inventors: Friedrich POPP, Christian KUTZA, Martin ROECKL, Tobias WEISS