Patents by Inventor Martin SCHEID

Martin SCHEID has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Diffractive optical element for a test interferometer
    Patent number: 12235097
    Abstract: A diffractive optical element (10) for a test interferometer (100) measures a shape of an optical surface (102). Diffractive shape measuring structures (16) are arranged on a used surface (14) of the element and generate a test wave (122) irradiating the surface when the element is arranged in the interferometer. At least one test field (18) several profile properties of test structures contained in the test field. The profile properties characterize a profile line of the test structures extending transversely with respect to the used surface and include a flank angle of the profile line, a profile depth and a depth of a microtrench in a bottom region of a trench-shaped profile of the test structures. The test field is arranged at one location of the used surface instead of the diffractive shape measuring structures such that the test field is surrounded by several diffractive shape measuring structures.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: February 25, 2025
    Assignee: CARL ZEISS SMT GMBH
    Inventors: Alexander Winkler, Martin Scheid, Hans Michael Stiepan, Jochen Hetzler, Frank Eisert
  • DIFFRACTIVE OPTICAL ELEMENT FOR A TEST INTERFEROMETER
    Publication number: 20220170735
    Abstract: A diffractive optical element (10) for a test interferometer (100) measures a shape of an optical surface (102). Diffractive shape measuring structures (16) are arranged on a used surface (14) of the element and generate a test wave (122) irradiating the surface when the element is arranged in the interferometer. At least one test field (18) several profile properties of test structures contained in the test field. The profile properties characterize a profile line of the test structures extending transversely with respect to the used surface and include a flank angle of the profile line, a profile depth and a depth of a microtrench in a bottom region of a trench-shaped profile of the test structures. The test field is arranged at one location of the used surface instead of the diffractive shape measuring structures such that the test field is surrounded by several diffractive shape measuring structures.
    Type: Application
    Filed: February 18, 2022
    Publication date: June 2, 2022
    Inventors: Alexander Winkler, Martin SCHEID, Hans Michael STIEPAN, Jochen HETZLER, Frank EISERT