Patents by Inventor Martin Soyka

Martin Soyka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HOST CONTROL FOR A VARIETY OF TOOLS IN SEMICONDUCTOR FABS
    Publication number: 20060025880
    Abstract: A software module for use within an integrated circuit fabrication facility sends commands to a tool according to a method that operates with any tool that satisfies SEMI standards to add or subtract steps in a process without reprogramming or recompiling. The program operates autonomously to change parameters of commands that it sends to the tool to improve performance of the fab.
    Type: Application
    Filed: July 29, 2004
    Publication date: February 2, 2006
    Applicant: International Business Machines Corporation
    Inventors: Padmavathi Chukka, Ying Du, Barry Herbold, Benjamin Herta, Krithikpriya Kunka, Frank Liang, Robert MacHugh, Sorabh Murgai, Thomas O'Leary, Chinmay Oza, Rakesh Parimi, Martin Soyka