Abstract: An embodiment is an electrostatic micro-pump including a diaphragm arrangement including a diaphragm and a first electrode structure. The electrostatic micro-pump further includes a valve arrangement, including an inlet check valve and an outlet check valve, wherein the diaphragm arrangement and the valve arrangement at least partially enclose a pump chamber. The electrostatic micro-pump further includes a second electrode structure arranged so as to form an electrostatic drive with the first electrode structure. The electrostatic drive is configured to deflect the diaphragm.

Abstract: A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

Abstract: A method for manufacturing at least one micromechanical device includes: providing a first and a separate second substrate, each having two surfaces spaced parallel to each other with a predetermined thickness; patterning a first trench structure into one of the two surfaces of the first substrate, and a second trench structure into one of the two surfaces of the second substrate; arranging the patterned surfaces of the two substrates with respect to each other such that a substrate stack with an upper and a lower surface is defined and the first and/or second trench structure forms at least one cavity therein; thinning the substrate stack from its upper and/or lower surface; exposing the at least one cavity by patterning a recess into the upper and/or lower surface of the substrate stack, wherein exposing the at least one cavity is performed after arranging the two substrates into the substrate stack. Further embodiments relate to a valve manufactured by means of the method and to a micromechanical pump.

Abstract: The invention relates to a pump having a piezo diaphragm transducer arranged at a pump body of the pump, and to a method for producing a pump, wherein a piezo diaphragm transducer is mounted to a pump body, wherein the method, among other things, has providing a piezoceramic layer. In accordance with the invention, at least one piezo element is diced from the piezoceramic layer so that the at least one piezo element has a regular polygon shape having at least six corners. In addition, the method has forming the piezo diaphragm transducer by mounting the piezo element to a pump diaphragm.

Abstract: The invention relates to a free-jet dosing system for dosing a free fluid jet to be dispensed. The free-jet dosing system includes, inter alia, a pump including an inlet and an outlet and configured to deliver fluid to be dispensed to the outlet. The free-jet dosing system further includes a dosage monitoring device arranged on the outlet side of the pump, the dosage monitoring device having an opening through which at least some of the fluid to be dispensed may pass, and the dosage monitoring device having a flow rate meter configured to determine the flow rate of the fluid which passes through the opening of the dosage monitoring device. In the inventive free-jet dosing system, the opening of the dosage monitoring device is configured as an outlet nozzle for ejecting the free fluid jet.

Abstract: A method for producing a micropump includes, among others, a step of providing a substrate, wherein the substrate includes at least one pump diaphragm for the micropump. Additionally, a diaphragm actuator for moving the pump diaphragm is provided, wherein the diaphragm actuator is arranged in an holding device. The holding device is aligned relative to the substrate such that the diaphragm actuator is arranged opposite to the pump diaphragm and the pump diaphragm is deflected in the direction of the diaphragm actuator by means of a fluid pressure that is higher than the ambient pressure. Additionally, the diaphragm actuator is mounted on the pump diaphragm.

Abstract: A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

Abstract: A free-jet dosing system for administering a fluid into or under the skin having a micropump and a nozzle arranged on the outlet side. The micropump has an inlet and an outlet and is configured to transport a fluid from the inlet to the outlet and to generate a blocking pressure of at least 20 bar at the outlet. The nozzle is configured to output the fluid output at the outlet as a free jet at a fluid pressure so that the fluid of the free jet may be injected into the skin.

Abstract: The invention relates to a method as well as a microdosing system for dosing an amount of fluid to be dispensed, wherein the microdosing system includes a micropump including an inlet and an outlet and configured to suck the fluid to be dispensed through the inlet and to dispense at least part of the fluid from the outlet. Further, the inventive microdosing system includes a first flow sensor arranged on the inlet side or the outlet side having an opening and a flow rate meter, wherein the flow rate meter is configured to determine the flow rate of the fluid passing through this opening. Additionally, the inventive microdosing system includes calibrators and/or fault detectors of the first flow sensor.

Abstract: The invention relates to a pump having a piezo diaphragm transducer arranged at a pump body of the pump, and to a method for producing a pump, wherein a piezo diaphragm transducer is mounted to a pump body, wherein the method, among other things, has providing a piezoceramic layer. In accordance with the invention, at least one piezo element is diced from the piezoceramic layer so that the at least one piezo element has a regular polygon shape having at least six corners. In addition, the method has forming the piezo diaphragm transducer by mounting the piezo element to a pump diaphragm.

Abstract: The invention relates to a method as well as a microdosing system for dosing an amount of fluid to be dispensed, wherein the microdosing system includes a micropump including an inlet and an outlet and configured to suck the fluid to be dispensed through the inlet and to dispense at least part of the fluid from the outlet. Further, the inventive microdosing system includes a first flow sensor arranged on the inlet side or the outlet side having an opening and a flow rate meter, wherein the flow rate meter is configured to determine the flow rate of the fluid passing through this opening. Additionally, the inventive microdosing system includes calibrators and/or fault detectors of the first flow sensor.

Abstract: The invention relates to a free-jet dosing system for dosing a free fluid jet to be dispensed. The free-jet dosing system includes, inter alia, a pump including an inlet and an outlet and configured to deliver fluid to be dispensed to the outlet. The free-jet dosing system further includes a dosage monitoring device arranged on the outlet side of the pump, the dosage monitoring device having an opening through which at least some of the fluid to be dispensed may pass, and the dosage monitoring device having a flow rate meter configured to determine the flow rate of the fluid which passes through the opening of the dosage monitoring device. In the inventive free-jet dosing system, the opening of the dosage monitoring device is configured as an outlet nozzle for ejecting the free fluid jet.

Abstract: A free-jet dosing system for administering a fluid into or under the skin having a micropump and a nozzle arranged on the outlet side. The micropump has an inlet and an outlet and is configured to transport a fluid from the inlet to the outlet and to generate a blocking pressure of at least 20 bar at the outlet. The nozzle is configured to output the fluid output at the outlet as a free jet at a fluid pressure so that the fluid of the free jet may be injected into the skin.

Abstract: A pump arrangement includes a microfluidic pump having a pump inlet and a pump outlet. The pump arrangement further includes a safety valve arrangement having first safety valve, the first safety valve being arranged between the pump outlet and an outlet of the pump arrangement and including a first valve seat and a first valve lid. The outlet of the pump arrangement and a first fluid region are formed in a first part of the pump arrangement, wherein the first valve lid is formed in a second integrated part of the pump arrangement, and wherein the first valve seat, the pump outlet and the pump inlet are patterned in a second surface of a third integrated part of the pump arrangement. The first fluid region is adjacent to the first valve lid, wherein a pressure in the first fluid region has a closing effect on the first safety valve.

Abstract: A method of manufacturing a bending transducer having a drive element and a membrane includes providing the membrane and the drive element and applying a production signal to the drive element during a bonding of the drive element to the membrane such that the drive element is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.

Abstract: A pump has an inlet opening, an outlet opening, a pump diaphragm comprising an opening, provided with a passive check valve, through the pump diaphragm, and an actuator configured to move the pump diaphragm between a first position and a second position. The passive check valve is configured such that a movement from the first position in the direction toward the second position has a closing effect, and that a movement from the second position in the direction toward the first position has an opening effect, so that a pumping cycle wherein the pump diaphragm is moved from the first to the second positions, and back, causes a net flow from the inlet opening to the outlet opening.

Abstract: A pump arrangement includes a microfluidic pump having a pump inlet and a pump outlet. The pump arrangement further includes a safety valve arrangement having first safety valve, the first safety valve being arranged between the pump outlet and an outlet of the pump arrangement and including a first valve seat and a first valve lid. The outlet of the pump arrangement and a first fluid region are formed in a first part of the pump arrangement, wherein the first valve lid is formed in a second integrated part of the pump arrangement, and wherein the first valve seat, the pump outlet and the pump inlet are patterned in a second surface of a third integrated part of the pump arrangement. The first fluid region is adjacent to the first valve lid, wherein a pressure in the first fluid region has a closing effect on the first safety valve.

Abstract: A diaphragm pump includes a pump chamber having an inlet opening and an outlet opening. A passive silicon check valve is provided at the inlet opening, and a passive silicon check valve is provided at the outlet opening. The diaphragm pump further includes a metallic pump diaphragm that adjoins the pump chamber.

Abstract: A valve, including a valve opening and a valve plate arranged to seal the valve opening in a closed state by means of compressing a sealing structure is provided, wherein the sealing structure includes an uncompressed dimension in a compression direction of less than 100 ?m.

Abstract: A method of manufacturing a bending transducer having a drive element and a membrane includes providing the membrane and the drive element and applying a production signal to the drive element during a bonding of the drive element to the membrane such that the drive element is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.