Patents by Inventor Martin Weltzer

Martin Weltzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing ultra-pure water, and configuration for carrying out a process of this nature
    Patent number: 6461519
    Abstract: A process and a configuration for producing ultra-pure water for a semiconductor manufacturing plant containing a plurality of manufacturing units. In a first purification step, untreated water undergoes preliminary purification in amounts required for the plant. In a plurality of final purification units, which are each assigned to at least one manufacturing unit, ultra-pure water of a stipulated quality is obtained from a treated water in a second purification step as a function of the process parameters of the associated manufacturing unit.
    Type: Grant
    Filed: January 12, 2000
    Date of Patent: October 8, 2002
    Assignee: Infineon Technologies AG
    Inventor: Martin Weltzer