Abstract: A method and apparatus for controlling a process in a system comprising pre-processing of a raw material, processing the pre-processed raw material and acquisition of the result of the processing of the pre-processed raw material, comprising the steps of: capturing input and output variables of the pre-processing; capturing output variables of the processing of the pre-processed raw material; creating a first, second and third process model for at least two different time scales, which describes the effects of adapting the pre-processing of raw material, the effects of adapting the processing of the pre-processed raw material, the effects of adapting the pre-processing of raw material and adapting the processing of pre-processed raw material on the output variables of the processing of pre-processed raw material; wherein the process in the system is controlled using the prediction of the process model which currently provides the best predictions for the process in the system.

Abstract: A method for controlling a process within a system, in particular a grinding process in a grinding device, comprising the following steps: .detecting 1 of state variables (st) of the system; creating 2 of at least two process models (PM), each describing the effects of actuating actions (at) on the state variables (st) of the system, wherein the structure of the at least two process models (PM) differs from each other; controlling 3 of the process within the system by executing actuating actions (at) under consideration of predefined control objectives and the process model, which currently provides the best prediction for the process running in the system. A device for carrying out the method according to the invention.

Abstract: The invention relates to an apparatus and a method for controlling 4 a process within a system, particularly a combustion process in a boiler or furnace, comprising the following steps: capturing 1 of state variables (st) of the system; creating 2 an interference model, which describes the effects of interference-based system changes (vt) on the state variables (st) of the system; creating 3 a process model, which describes the effects of setting actions (at) on the state variables (st) of the system; and controlling 4 the process within the system by performing setting actions (at) by considering the process model, the interference model and predetermined controlling goals.

Abstract: A wafer/loadport assembly that has a built-in, self-identification system and a method for operating the assembly are described. The wafer cassette is equipped with recessed holes provided with electrically conductive plates for contacting locating pins on a loadport wherein the locating pins are provided with electrically conductive tips for allowing a current to flow through the plate. By different combinations of the electrically conductive tips and the electrically conductive plates provided in the recess holes, the type of wafer cassette can be determined and identified by the process controller.

Abstract: A wafer/loadport assembly that has a built-in, self-identification system and a method for operating the assembly are described. The wafer cassette is equipped with recessed holes provided with electrically conductive plates for contacting locating pins on a loadport wherein the locating pins are provided with electrically conductive tips for allowing a current to flow through the plate. By different combinations of the electrically conductive tips and the electrically conductive plates provided in the recess holes, the type of wafer cassette can be determined and identified by the process controller.