Patents by Inventor Martin Woelky

Martin Woelky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of producing a thin-film resonator
    Patent number: 7805820
    Abstract: A thin-film resonator and a method for producing a thin-film component includes, for the purpose of structuring an upper first dielectric layer, a mask that comprises a second dielectric layer facing the upper dielectric layer and a photoresist layer. Initially, the photoresist layer that serves as photomask during the structuring of the second dielectric layer is structured. The structures of the second dielectric layer, together with the structures of the photoresist layer located thereabove, form a mask that is used for structuring the first dielectric layer.
    Type: Grant
    Filed: December 13, 2005
    Date of Patent: October 5, 2010
    Assignee: Epcos AG
    Inventors: Christoph Eggs, Ansgar Schäufele, Martin Woelky
  • Thin-film resonator and method for producing a multi-layer component
    Publication number: 20060170308
    Abstract: A thin-film resonator and a method for producing a thin-film component includes, for the purpose of structuring an upper first dielectric layer, a mask that comprises a second dielectric layer facing the upper dielectric layer and a photoresist layer. Initially, the photoresist layer that serves as photomask during the structuring of the second dielectric layer is structured. The structures of the second dielectric layer, together with the structures of the photoresist layer located thereabove, form a mask that is used for structuring the first dielectric layer.
    Type: Application
    Filed: December 13, 2005
    Publication date: August 3, 2006
    Inventors: Christoph Eggs, Ansgar Schaufele, Martin Woelky