Patents by Inventor Martin ZECH

Martin ZECH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stick-slip drive, especially piezo-actuated inertial drive
    Patent number: 10505470
    Abstract: Disclosed is a stick-slip drive comprising a base and a rotor which are in contact with one another via a friction surface and are coupled to one another in such a way that the rotor can perform an inertial motion relative to the base, characterized in that two materials, a noble metal and a ceramic material, are paired up on the friction surface between the base and the rotor.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: December 10, 2019
    Assignee: ATTOCUBE SYSTEMS AG
    Inventors: Martin Zech, Jan Schoebel, Thomas Pickert
  • Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems
    Patent number: 10260863
    Abstract: Interferometer (10) for the real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). wherein the measurement unit (20) comprises a housing (21) with at least one wall made of heat-conducting material, wherein several measurement elements are arranged in the housing (21), wherein the measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23) wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: April 16, 2019
    Assignee: attocube systems AG
    Inventors: Martin Zech, Klaus Thurner
  • STICK-SLIP DRIVE, ESPECIALLY PIEZO-ACTUATED INERTIAL DRIVE
    Publication number: 20170310247
    Abstract: Disclosed is a stick-slip drive comprising a base and a rotor which are in contact with one another via a friction surface and are coupled to one another in such a way that the rotor can perform an inertial motion relative to the base, characterized in that two materials, a noble metal and a ceramic material, are paired up on the friction surface between the base and the rotor.
    Type: Application
    Filed: October 18, 2015
    Publication date: October 26, 2017
    Inventors: Martin ZECH, Jan SCHOEBEL, Thomas PICKERT
  • INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS
    Publication number: 20170045353
    Abstract: Interferometer (10) for the real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). wherein the measurement unit (20) comprises a housing (21) with at least one wall made of heat-conducting material, wherein several measurement elements are arranged in the housing (21), wherein the measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23) wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material.
    Type: Application
    Filed: April 29, 2015
    Publication date: February 16, 2017
    Inventors: Martin ZECH, Klaus THURNER