Abstract: In a discharge-produced plasma source, a pair of electrodes is charged using a transmission line. In an embodiment, a pair of transmission lines may be used, connected symmetrically to the electrodes. The impedance of the transmission lines, or the total impedance of the transmission lines, is equal to that of the discharge in an embodiment. Use of a transmission line provides longer discharge pulses with more consistent potential difference.

Abstract: The electronic device comprises a semiconductor device (10), particularly an integrated circuit, and a carrier substrate (20) with conductive layers on the first side (21) and the second side (22), and voltage supply (62) and ground connections (61) mutually arranged according to a chessboard pattern. These connections (61,62) extend in a direct path through vertical interconnects and bumps (41,42) to bond pads at the integrated circuit, which bond pads are arranged in a corresponding chessboard pattern. As a result, an array of direct paths is provided, wherein the voltage supply connections (62) form as much as possible the coaxial center conductors of a coaxial structure.

Abstract: The electronic device (100) comprises an integrated circuit (10) and a carrier substrate (20) with a bottom and top conductive layer, and is provided with voltage supply, ground and signal transmission connections. In order to enable the use of more than one supply voltage, the integrated circuit (10) is subdivided into core functionality (110) and peripheral functionality (210), and the carrier substrate (20) is subdivided into a corresponding core area (31) and peripheral area (32). The ground connections of both core and periphery are mutually coupled through an interconnect (22) in the carrier substrate (20). This interconnect is particularly a ground plane, and allows the provision of a transmission line character to the interconnects for signal transmission of the periphery.