Patents by Inventor Martinus Hendrikue Antonius Leenders

Martinus Hendrikue Antonius Leenders has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20030063266
    Abstract: An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity.
    Type: Application
    Filed: September 6, 2002
    Publication date: April 3, 2003
    Inventors: Martinus Hendrikue Antonius Leenders, Johannes Hubertus Josephina Moors, Erik Roelof Loopstra, Noud Jan Gilissen