Patents by Inventor Martinus Theodorus Jacobus Pieterse

Martinus Theodorus Jacobus Pieterse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement system, method and lithographic apparatus
    Patent number: 8681316
    Abstract: A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.
    Type: Grant
    Filed: May 26, 2011
    Date of Patent: March 25, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Henrikus Herman Marie Cox, Willem Herman Gertruda Anna Koenen, Thomas Augustus Mattaar, Martinus Theodorus Jacobus Pieterse, Rob Antonius Andries Verkooijen
  • MEASUREMENT SYSTEM, METHOD AND LITOGRAPHIC APPARATUS
    Publication number: 20110317142
    Abstract: A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of the object from the position quantity measurement signal, wherein the position quantity calculator includes a torsion estimator configured to estimate a torsion of the object, the position quantity calculator being configured to correct the determined position quantity of the object for the estimated torsion.
    Type: Application
    Filed: May 26, 2011
    Publication date: December 29, 2011
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Henrikus Herman Marie Cox, Willem Herman Gertruda Anna Koenen, Thomas Augustus Mattaar, Martinus Theodorus Jacobus Pieterse, Rob Antonius Andries Verkooijen