Patents by Inventor Marty Scales

Marty Scales has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Article for polishing semiconductor substrates
    Patent number: 7014538
    Abstract: A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: March 21, 2006
    Assignee: Applied Materials, Inc.
    Inventors: James V. Tietz, Shijian Li, Manoocher Birang, John M. White, Sandra L. Rosenberg, legal representative, Marty Scales, Ramin Emami, Lawrence M. Rosenberg, deceased
  • Fixed abrasive articles
    Publication number: 20040082288
    Abstract: A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.
    Type: Application
    Filed: March 5, 2003
    Publication date: April 29, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: James V. Tietz, Shijian Li, Manoocher Birang, John M. White, Lawrence M. Rosenberg, Marty Scales, Ramin Emami, Sandra L. Rosenberg