Patents by Inventor Marvin E. Roth

Marvin E. Roth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum treating apparatus
    Patent number: 4062319
    Abstract: A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within the chamber and allows selective exposure of the pump to the chamber. An annular workholder is mounted in concentric surrounding relation with the pump, and an apertured, annular shutter is mounted in concentric surrounding relation with the workholder. Targets of materials to be sputter deposited on the workpieces are mounted on the inside wall of the main enclosure of the apparatus. The shutter and the workholder are moved in synchronism at the beginning and at the end of the deposition cycle to provide a uniform exposure of all the workpieces to the targets.
    Type: Grant
    Filed: January 10, 1977
    Date of Patent: December 13, 1977
    Assignee: Western Electric Co., Inc.
    Inventors: Marvin E. Roth, Donald J. Vallere
  • Sputtering apparatus
    Patent number: 4051010
    Abstract: A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within the chamber and allows selective exposure of the pump to the chamber. An annular workholder is mounted in concentric surrounding relation with the pump, and an apertured, annular shutter is mounted in concentric surrounding relation with the workholder. Targets of materials to be sputter deposited on the workpieces are mounted on the inside wall of the main enclosure of the apparatus. The shutter and the workholder are moved in synchronism at the beginning and at the end of the deposition cycle to provide a uniform exposure of all the workpieces to the targets.
    Type: Grant
    Filed: January 10, 1977
    Date of Patent: September 27, 1977
    Assignee: Western Electric Company, Inc.
    Inventors: Marvin E. Roth, Donald J. Vallere
  • Synchronous shielding in vacuum deposition system
    Patent number: 4022939
    Abstract: A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within the chamber and allows selective exposure of the pump to the chamber. An annular workholder is mounted in concentric surrounding relation with the pump, and an apertured, annular shutter is mounted in concentric surrounding relation with the workholder. Targets of materials to be sputter deposited on the workpieces are mounted on the inside wall of the main enclosure of the apparatus. The shutter and the workholder are moved in synchronism at the beginning and at the end of the deposition cycle to provide a uniform exposure of all the workpieces to the targets.
    Type: Grant
    Filed: December 18, 1975
    Date of Patent: May 10, 1977
    Assignee: Western Electric Company, Inc.
    Inventors: Marvin E. Roth, Donald J. Vallere