Patents by Inventor Marvin Leventhal

Marvin Leventhal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device manufacture involving step-and-scan delineation
    Patent number: 5260151
    Abstract: Fabrication of submicron design rule large scale integrated circuits depends upon use of a strut-segmented mask with struts providing mechanical support to permit thinned mask segments consequently yielding improved resolution. "Stitching"--positioning of projected segment images to yield a satisfactory continuous image--is aided by lithographically defined skirts forming a continuous border within strut-supported segments.
    Type: Grant
    Filed: December 30, 1991
    Date of Patent: November 9, 1993
    Assignee: AT&T Bell Laboratories
    Inventors: Steven D. Berger, Marvin Leventhal, James A. Liddle