Patents by Inventor Mary A. Caolo

Mary A. Caolo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polymethyl methacrylate compatible silicon dioxide complexing agent
    Patent number: 4508591
    Abstract: An etching solution for the dissolution of silicon dioxide through a portable conformable mask, with PMMA as the etch stop layer, has been developed which eliminates resist lifting and non-uniform lateral etching, thereby providing the improved oxide edge definitions required for 1 micron line geometries in VLSI chips.
    Type: Grant
    Filed: March 8, 1984
    Date of Patent: April 2, 1985
    Assignee: Hewlett-Packard Company
    Inventors: Keith G. Bartlett, Mary A. Caolo