Patents by Inventor Mary C. Freeman

Mary C. Freeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser cleaning process for semiconductor material and the like
    Patent number: 6494217
    Abstract: A laser cleaning process is disclosed for cleaning the surface of materials, such as semiconductor wafers and the like, which process can be performed at atmospheric pressure. The process includes the steps of providing a structure with a surface having undesirable contaminant particles thereon, wetting the surface with a liquid including reactive or non-reactive liquids, and irradiating the surface using photon energy with sufficient energy to remove the wetting liquid and the undesirable material.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: December 17, 2002
    Assignee: Motorola, Inc.
    Inventors: Danny L. Thompson, Mary C. Freeman, Ronald N. Legge
  • Laser cleaning process for semiconductor material and the like
    Publication number: 20010011545
    Abstract: A laser cleaning process is disclosed for cleaning the surface of materials, such as semiconductor wafers and the like, which process can be performed at atmospheric pressure. The process includes the steps of providing a structure with a surface having undesirable contaminant particles thereon, wetting the surface with a liquid including reactive or non-reactive liquids, and irradiating the surface using photon energy with sufficient energy to remove the wetting liquid and the undesirable material.
    Type: Application
    Filed: January 23, 2001
    Publication date: August 9, 2001
    Applicant: Motorola, Inc.
    Inventors: Danny L. Thompson, Mary C. Freeman, Ronald N. Legge