Patents by Inventor Mary E. B. Coe

Mary E. B. Coe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method of silicide gates and interconnects for integrated circuits
    Patent number: 4443930
    Abstract: A method of forming on a substrate a layer of silicon-rich metal silicide such as tungsten silicide, WSi.sub.x where x>2 by cosputtering a tungsten disilicide (WSi.sub.2) target and a doped silicon target on to the substrate which is maintained at room temperature. When the silicon-rich silicide is deposited on a doped polysilicon layer the resulting silicon-rich metal silicide/polysilicon sandwich layer has a low resistivity and is suitable for forming therefrom gates and interconnecting conductors for integrated circuit devices.
    Type: Grant
    Filed: November 30, 1982
    Date of Patent: April 24, 1984
    Assignee: NCR Corporation
    Inventors: Thomas J. Hwang, Steven H. Rogers, Mary E. B. Coe