Patents by Inventor Mary E. Rothwell

Mary E. Rothwell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11683995
    Abstract: Techniques regarding lithographic processes for fabricating Josephson junctions are provided. For example, one or more embodiments described herein can comprise a method that can include depositing a first resist layer onto a second resist layer. The first resist layer can include a bridge portion that defines an opening for forming a Josephson junction. The method can also comprise depositing a third resist layer onto the bridge portion. The third resist layer can shield the opening from an angled deposition of a superconducting material during fabrication of the Josephson junction.
    Type: Grant
    Filed: August 3, 2020
    Date of Patent: June 20, 2023
    Assignee: International Business Machines Corporation
    Inventors: Kenneth P. Rodbell, Leonidas Ernesto Ocola, Charles Thomas Rettner, Mary E Rothwell, Elbert Emin Huang
  • Publication number: 20220037578
    Abstract: Techniques regarding lithographic processes for fabricating Josephson junctions are provided. For example, one or more embodiments described herein can comprise a method that can include depositing a first resist layer onto a second resist layer. The first resist layer can include a bridge portion that defines an opening for forming a Josephson junction. The method can also comprise depositing a third resist layer onto the bridge portion. The third resist layer can shield the opening from an angled deposition of a superconducting material during fabrication of the Josephson junction.
    Type: Application
    Filed: August 3, 2020
    Publication date: February 3, 2022
    Inventors: Kenneth P. Rodbell, Leonidas Ernesto Ocola, Charles Thomas Rettner, Mary E. Rothwell, Elbert Emin Huang
  • Patent number: 11168234
    Abstract: The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: November 9, 2021
    Assignee: International Business Machines Corporation
    Inventors: James L. Hedrick, Robert D. Miller, Deborah A. Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Patent number: 10767084
    Abstract: The present invention related to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: September 8, 2020
    Assignee: International Business Machines Corporation
    Inventors: James L. Hedrick, Robert Dennis Miller, Deborah Ann Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Publication number: 20200165494
    Abstract: The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Application
    Filed: January 23, 2020
    Publication date: May 28, 2020
    Inventors: James L. Hedrick, Robert D. Miller, Deborah A. Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Publication number: 20190378781
    Abstract: The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Application
    Filed: June 7, 2018
    Publication date: December 12, 2019
    Inventors: James L. Hedrick, Robert Dennis Miller, Deborah Ann Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Publication number: 20180340100
    Abstract: The present invention related to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Application
    Filed: June 8, 2018
    Publication date: November 29, 2018
    Inventors: James L. Hedrick, Robert Dennis Miller, Deborah Ann Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Patent number: 10008655
    Abstract: A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
    Type: Grant
    Filed: July 29, 2015
    Date of Patent: June 26, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, George A Keefe, Chad T. Rigetti, Mary E. Rothwell
  • Patent number: 9994741
    Abstract: The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Grant
    Filed: December 13, 2015
    Date of Patent: June 12, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James L. Hedrick, Robert Dennis Miller, Deborah Ann Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Patent number: 9716219
    Abstract: A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
    Type: Grant
    Filed: August 19, 2013
    Date of Patent: July 25, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Josephine B. Chang, George A. Keefe, Chad T. Rigetti, Mary E. Rothwell
  • Publication number: 20170166784
    Abstract: The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
    Type: Application
    Filed: December 13, 2015
    Publication date: June 15, 2017
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: James L. Hedrick, Robert Dennis Miller, Deborah Ann Neumayer, Sampath Purushothaman, Mary E. Rothwell, Willi Volksen, Roy R. Yu
  • Patent number: 9531055
    Abstract: A coplanar waveguide device includes a coplanar waveguide structure disposed on a substrate, at least one qubit coupled to the coplanar waveguide structure and an add-on chip having a metallized trench, and disposed over the substrate.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: December 27, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David W. Abraham, Jerry M. Chow, Antonio D. Corcoles Gonzalez, George A. Keefe, Mary E. Rothwell, James R. Rozen, Matthias Steffen
  • Patent number: 9520547
    Abstract: A method for fabricating a chip surface base includes preparing a first substrate, preparing a plurality of vias in the first substrate, depositing metal fillings into the plurality of vias, preparing a second substrate, bonding the first and second substrates and exposing the metal fillings. A method for fabricating a chip surface base includes preparing a first and second substrate, depositing a metal on at least one of the first and second substrates, bonding the first and second substrates, preparing a plurality of vias in the first substrate, depositing metal fillings into the plurality of vias and exposing the metal fillings. A chip surface base device includes a first substrate, a second substrate, a metal layer disposed between the first and second substrates and a plurality vias disposed on the first substrate.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: December 13, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David W. Abraham, George A. Keefe, Christian Lavoie, Mary E. Rothwell
  • Patent number: 9455392
    Abstract: A coplanar waveguide device includes a coplanar waveguide structure disposed on a substrate, at least one qubit coupled to the coplanar waveguide structure and an add-on chip having a metallized trench, and disposed over the substrate.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: September 27, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David W. Abraham, Jerry M. Chow, Antonio D. Corcoles Gonzalez, George A. Keefe, Mary E. Rothwell, James R. Rozen, Matthias Steffen
  • Patent number: 9397283
    Abstract: A method for fabricating a chip surface base includes preparing a first substrate, preparing a plurality of vias in the first substrate, depositing metal fillings into the plurality of vias, preparing a second substrate, bonding the first and second substrates and exposing the metal fillings. A method for fabricating a chip surface base includes preparing a first and second substrate, depositing a metal on at least one of the first and second substrates, bonding the first and second substrates, preparing a plurality of vias in the first substrate, depositing metal fillings into the plurality of vias and exposing the metal fillings. A chip surface base device includes a first substrate, a second substrate, a metal layer disposed between the first and second substrates and a plurality of vias disposed on the first substrate.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: July 19, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: David W. Abraham, George A. Keefe, Christian Lavoie, Mary E. Rothwell
  • Publication number: 20160204330
    Abstract: A coplanar waveguide device includes a coplanar waveguide structure disposed on a substrate, at least one qubit coupled to the coplanar waveguide structure and an add-on chip having a metallized trench, and disposed over the substrate.
    Type: Application
    Filed: January 30, 2015
    Publication date: July 14, 2016
    Inventors: David W. Abraham, Jerry M. Chow, Antonio D. Corcoles Gonzalez, George A. Keefe, Mary E. Rothwell, James R. Rozen, Matthias Steffen
  • Publication number: 20160204331
    Abstract: A coplanar waveguide device includes a coplanar waveguide structure disposed on a substrate, at least one qubit coupled to the coplanar waveguide structure and an add-on chip having a metallized trench, and disposed over the substrate.
    Type: Application
    Filed: January 30, 2015
    Publication date: July 14, 2016
    Inventors: David W. Abraham, Jerry M. Chow, Antonio D. Corcoles Gonzalez, George A. Keefe, Mary E. Rothwell, James R. Rozen, Matthias Steffen
  • Patent number: 9219298
    Abstract: A coplanar waveguide device includes a coplanar waveguide structure disposed on a substrate, at least one qubit coupled to the coplanar waveguide structure and an add-on chip having a metallized trench, and disposed over the substrate.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: December 22, 2015
    Assignee: International Business Machines Corporation
    Inventors: David W. Abraham, Jerry M. Chow, Antonio D. Corcoles Gonzalez, George A. Keefe, Mary E. Rothwell, James R. Rozen, Matthias Steffen
  • Publication number: 20150340584
    Abstract: A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
    Type: Application
    Filed: July 29, 2015
    Publication date: November 26, 2015
    Inventors: Josephine B. Chang, George A. Keefe, Chad T. Rigetti, Mary E. Rothwell
  • Patent number: 9177814
    Abstract: A qubit system includes a substrate layer, a qubit circuit suspended above the substrate layer and fine structure disposed between the qubit circuit and the substrate layer.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: November 3, 2015
    Assignee: International Business Machines Corporation
    Inventors: Josephine B. Chang, George A. Keefe, Chad T. Rigetti, Mary E. Rothwell