Patents by Inventor Mary E. Weber

Mary E. Weber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Uniform gas distributor to a wafer
    Patent number: 5174825
    Abstract: A gas distribution system 140 includes a gas distribution chamber 142 and a gas distributor 154. Gas distribution chamber 142 includes an open end 144 and a closed end 146. A workpiece 148 is disposed adjacent closed end 146. Gas distributor 154 includes an outer collar 156 and an inner collar 158. Inner collar 158 has a continuously increasing cross-sectional diameter from a first predetermined point 160 to a second predetermined point 162. Gases are introduced through an inlet tube 150 disposed through an aperture in a platform 152 into the interior of inner collar 158 and toward workpiece 148. A diverter 164 diverts incoming gases from inlet tube 150.
    Type: Grant
    Filed: August 23, 1990
    Date of Patent: December 29, 1992
    Assignee: Texas Instruments Incorporated
    Inventors: Daniel White, Jr., Mary E. Weber