Patents by Inventor Mary Y. Chen

Mary Y. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9812532
    Abstract: A field effect transistor includes a III-Nitride channel layer, a III-Nitride doped cap layer on the channel layer, a source electrode in contact with the III-Nitride cap layer, a drain electrode in contact with the III-Nitride cap layer, a gate electrode located between the source and the drain electrodes, and a gate dielectric layer between the gate electrode and the III-Nitride undoped channel layer, wherein the cap layer is doped to provide mobile holes, and wherein the gate dielectric layer comprises a layer of AlN in contact with the channel layer.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: November 7, 2017
    Assignee: HRL Laboratories, LLC
    Inventors: Rongming Chu, Yu Cao, Mary Y. Chen, Zijian “Ray” Li
  • Patent number: 9646839
    Abstract: A method of forming an Ohmic contact including forming a Ta layer in a contact area of a barrier, forming a Ti layer on the first Ta layer, and forming an Al layer on the Ti layer, wherein the barrier layer comprises AlGaN having a 10% to 40% Al composition and a thickness in a range between 30 ? to 100 ?, and wherein the barrier layer is on a channel layer comprising GaN.
    Type: Grant
    Filed: June 11, 2014
    Date of Patent: May 9, 2017
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Rongming Chu
  • Publication number: 20160276161
    Abstract: A method of forming an Ohmic contact including forming a Ta layer in a contact area of a barrier, forming a Ti layer on the first Ta layer, and forming an Al layer on the Ti layer, wherein the barrier layer comprises AlGaN having a 10% to 40% Al composition and a thickness in a range between 30 ? to 100 ?, and wherein the barrier layer is on a channel layer comprising GaN.
    Type: Application
    Filed: June 11, 2014
    Publication date: September 22, 2016
    Applicant: HRL LABORATORIES, LLC
    Inventors: Mary Y. CHEN, Rongming Chu
  • Patent number: 9337332
    Abstract: A field-effect transistor (FET) includes a plurality of semiconductor layers, a source electrode and a drain electrode contacting one of the semiconductor layers, a first dielectric layer on a portion of a top semiconductor surface between the source and drain electrodes, a first trench extending through the first dielectric layer and having a bottom located on a top surface or within one of the semiconductor layers, a second dielectric layer lining the first trench and covering a portion of the first dielectric layer, a third dielectric layer over the semiconductor layers, the first dielectric layer, and the second dielectric layer, a second trench extending through the third dielectric layer and having a bottom located in the first trench on the second dielectric layer and extending over a portion of the second dielectric, and a gate electrode filling the second trench.
    Type: Grant
    Filed: May 29, 2014
    Date of Patent: May 10, 2016
    Assignee: HRL Laboratories, LLC
    Inventors: Rongming Chu, Mary Y. Chen, Xu Chen, Zijian “Ray” Li, Karim S. Boutros
  • Publication number: 20150364330
    Abstract: A method of forming an Ohmic contact including forming a Ta layer in a contact area of a barrier layer by evaporation at an evaporation rate of 1 ?/second, forming a Ti layer on the first Ta layer, and forming an Al layer on the Ti layer, wherein the barrier layer comprises AlGaN having a 25% Al composition and a thickness in a range between 30 ? to 100 ?, and wherein the barrier layer is on a channel layer comprising GaN.
    Type: Application
    Filed: June 11, 2014
    Publication date: December 17, 2015
    Inventors: Mary Y. CHEN, Ronming CHU
  • Publication number: 20150349117
    Abstract: A field-effect transistor (FET) includes a plurality of semiconductor layers, a source electrode and a drain electrode contacting one of the semiconductor layers, a first dielectric layer on a portion of a top semiconductor surface between the source and drain electrodes, a first trench extending through the first dielectric layer and having a bottom located on a top surface or within one of the semiconductor layers, a second dielectric layer lining the first trench and covering a portion of the first dielectric layer, a third dielectric layer over the semiconductor layers, the first dielectric layer, and the second dielectric layer, a second trench extending through the third dielectric layer and having a bottom located in the first trench on the second dielectric layer and extending over a portion of the second dielectric, and a gate electrode filling the second trench.
    Type: Application
    Filed: May 29, 2014
    Publication date: December 3, 2015
    Inventors: Rongming CHU, Mary Y. Chen, Xu Chen, Zijian "Ray" Li, Karim S. Boutros
  • Patent number: 9117763
    Abstract: Semiconductor device identification using quantum dot technology. A semiconductor nanocrystal based target is fabricated. A guard ring superjacent the fluorescing surface of the nanocrystal surface is provided to ensure repeatability of spectral mapping and analysis data. A transparent cap on the target may enhance performance. A system for coding a semiconductor device is described. A method is described for fabricating quantum dot targets in a methodology compatible with subsequent semiconductor fabrication process steps.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: August 25, 2015
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Peter W. Deelman, Marko Sokolich
  • Patent number: 8653559
    Abstract: A field effect transistor (FET) includes source and drain electrodes, a channel layer, a barrier layer over the channel layer, a passivation layer covering the barrier layer for passivating the barrier layer, a gate electrode extending through the barrier layer and the passivation layer, and a gate dielectric surrounding a portion of the gate electrode that extends through the barrier layer and the passivation layer, wherein the passivation layer is a first material and the gate dielectric is a second material, and the first material is different than the second material.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: February 18, 2014
    Assignee: HRL Laboratories, LLC
    Inventors: Andrea Corrion, Karim S. Boutros, Mary Y. Chen, Samuel J. Kim, Rongming Chu, Shawn D. Burnham
  • Patent number: 8595654
    Abstract: Semiconductor device identification using quantum dot technology. A semiconductor nanocrystal based target is fabricated. A guard ring superjacent the fluorescing surface of the nanocrystal surface is provided to ensure repeatability of spectral mapping and analysis data. A transparent cap on the target may enhance performance. A system for coding a semiconductor device is described. A method is described for fabricating quantum dot targets in a methodology compatible with subsequent semiconductor fabrication process steps.
    Type: Grant
    Filed: October 3, 2006
    Date of Patent: November 26, 2013
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Peter W. Deelman, Marko Sokolich
  • Publication number: 20130001646
    Abstract: A field effect transistor (FET) includes source and drain electrodes, a channel layer, a barrier layer over the channel layer, a passivation layer covering the barrier layer for passivating the barrier layer, a gate electrode extending through the barrier layer and the passivation layer, and a gate dielectric surrounding a portion of the gate electrode that extends through the barrier layer and the passivation layer, wherein the passivation layer is a first material and the gate dielectric is a second material, and the first material is different than the second material.
    Type: Application
    Filed: June 29, 2011
    Publication date: January 3, 2013
    Applicant: HRL LABORATORIES, LLC
    Inventors: Andrea Corrion, Karim S. Boutros, Mary Y. Chen, Samuel J. Kim, Rongming Chu, Shawn D. Burnham
  • Patent number: 7892881
    Abstract: In one aspect, a method includes forming a silicon dioxide layer on a surface of a diamond layer disposed on a gallium nitride (GaN)-type layer. The method also includes etching the silicon dioxide layer to form a pattern. The method further includes etching portions of the diamond exposed by the pattern.
    Type: Grant
    Filed: February 23, 2009
    Date of Patent: February 22, 2011
    Assignee: Raytheon Company
    Inventors: Mary Y. Chen, Peter W. Deelman
  • Publication number: 20100216301
    Abstract: In one aspect, a method includes forming a silicon dioxide layer on a surface of a diamond layer disposed on a gallium nitride (GaN)-type layer. The method also includes etching the silicon dioxide layer to form a pattern. The method further includes etching portions of the diamond exposed by the pattern.
    Type: Application
    Filed: February 23, 2009
    Publication date: August 26, 2010
    Inventors: MARY Y. CHEN, Peter W. Deelman
  • Patent number: 7582536
    Abstract: An electronic device contains a substrate, a sub-collector supported by the substrate, an un-doped layer having a selectively implanted buried sub-collector and supported by the sub-collector, an As-based nucleation layer partially supported by the un-doped layer, a collector layer supported by the As-based nucleation layer, a base layer supported by the collector layer, an emitter layer and a base contact supported by the base layer, an emitter cap layer supported by the emitter layer, an emitter contact supported by the emitter cap layer, and a collector contact supported by the sub-collector. A method provides for selecting a first InP layer, forming an As-based nucleation layer on the first InP layer, and epitaxially growing a second InP layer on the As-based nucleation layer.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: September 1, 2009
    Assignee: HRL Laboratories, LLC
    Inventors: Rajesh D. Rajavel, Mary Y. Chen, Steven S. Bui, David H. Chow, James Chingwei Li, Mehran Mokhtari, Marko Sokolich
  • Patent number: 7531851
    Abstract: An electronic device contains a substrate, a sub-collector supported by the substrate, an un-doped layer having a selectively implanted buried sub-collector and supported by the sub-collector, an As-based nucleation layer partially supported by the un-doped layer, a collector layer supported by the As-based nucleation layer, a base layer supported by the collector layer, an emitter layer and a base contact supported by the base layer, an emitter cap layer supported by the emitter layer, an emitter contact supported by the emitter cap layer, and a collector contact supported by the sub-collector. A method provides for selecting a first InP layer, forming an As-based nucleation layer on the first InP layer, and epitaxially growing a second InP layer on the As-based nucleation layer.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: May 12, 2009
    Assignee: HRL Laboratories, LLC
    Inventors: Rajesh D. Rajavel, Mary Y. Chen, Steven S. Bui, David H. Chow, James Chingwei Li, Mehran Mokhtari, Marko Sokolich
  • Patent number: 7470619
    Abstract: Described is a method for forming a stackable interconnect. The interconnect is formed by depositing a first contact on a substrate; depositing a seed layer (SL) on the substrate; depositing a metal mask layer (MML) on the SL; depositing a bottom anti-reflection coating (BARC) on the MML; forming a photoresist layer (PR) on the BARC; removing a portion of the PR; etching the BARC and the MML to expose the SL; plating the exposed SL to form a first plated plug; removing the layers to expose the SL; removing an unplated portion of the SL; depositing an inter layer dielectric (ILD) on the interconnect; etching back the ILD to expose the first plated plug; and depositing a second contact on the first plated plug. Using the procedures described above, a second plated plug is then formed on the first plated plug to form the stackable plugged via interconnect.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: December 30, 2008
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, James Chingwei Li, Philip H. Lawyer, Marko Sokolich
  • Patent number: 7259444
    Abstract: In one embodiment, an optoelectronic device is provided having a pin photo diode including a semi-insulating substrate or layer, with a patterned implant region of a first dopant type. The pin photo diode includes an upper layer having semiconductor material with a second dopant type. An intermediate layer is provided having a substantially intrinsic semiconductor material. An upper layer contact is provided having a portion with a generally circular interior facing edge. The implant region has a first portion having an outer periphery substantially nonoverlapping with the interior facing edge of the upper layer contact. The implant region includes a contact portion located beyond the upper layer contact. A connecting portion couples the first portion and the contact portion of the implant region. In one embodiment, the device includes a heterojunction bipolar transistor coupled to the pin photo diode.
    Type: Grant
    Filed: July 20, 2004
    Date of Patent: August 21, 2007
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Donald A. Hitko
  • Patent number: 5528209
    Abstract: A monolithic microwave integrated circuit is formed by positioning a distributed, transmission-line network over a microwave-device structure. The ground plane of the transmission-line network adjoins an interconnect system of the microwave-device structure and signal lines of the transmission-line network are adapted to communicate with the microwave-device structure through orifices of the ground plane. The invention facilitates the use of low-cost silicon-based transistors in monolithic microwave integrated circuits.
    Type: Grant
    Filed: April 27, 1995
    Date of Patent: June 18, 1996
    Assignee: Hughes Aircraft Company
    Inventors: Perry A. Macdonald, Lawrence E. Larson, Michael G. Case, Mehran Matloubian, Mary Y. Chen, David B. Rensch