Abstract: A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced while the substrate is supported by a rotating mould by forming an atmosphere of high temperature gas and supplying a metered quantity of powders of quartz to the high temperature gas atmosphere to have the quartz powders molten at least partly and directed toward an inner surface of the substrate to be adhered thereon.

Abstract: A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced while the substrate is supported by a rotating mould by forming an atmosphere of high temperature gas and supplying a metered quantity of powders of quartz to the high temperature gas atmosphere to have the quartz powders molten at least partly and directed toward an inner surface of the substrate to be adhered thereon.

Abstract: A substrate processing system basically comprises a coater-developer apparatus, an exposure processing apparatus and a conveyance controlling apparatus. The coater-developer apparatus comprises a coater unit including a coater for applying photo-resist on the substrate, and a developer unit for developing the substrate. The exposure processing apparatus includes an exposing means, and an inspection means for inspecting the photo-resist pattern on the substrate. The conveyance controlling apparatus conveys or feeds the substrate through the coater unit, exposure processing apparatus and developer unit in order.

Abstract: A method for diagnosis of cancer utilizing an ESR spectrometer comprised a first step for mixing cells from a patient with a solution of hematoporphyrin or hematoporphyrin derivative, a second step for isolating said cells from unreacted reagent and obtaining ESR spectral signal on said cells, a third step for finding quantity S.sub.x of the radicals contained in said cells on the basis of the ESR signal, and a fourth step for comparing value S.sub.x at a predetermined level.

Abstract: A comparison-type dimension measurement system in which a laser 1 provides linearly polarized light that is directed by a polarization beam splitter 5 into a microscope system in which a specimen 13 is mounted. The reflected polarized light is rotated 90.degree. by a quarter wave plate 9 and passes through the beam splitter to a multi-element line sensor 19. The laser light is scanned by a rotatable mirror 3 over the specimen. Threshold intensities are determined on indicia of known separation on a reference specimen and used to calibrate the distance measured by the line sensor.

Abstract: An automatic focusing device for vertical focusing of a specimen 23 in which an enlarging condenser lens 11 is placed between a light source 12 and a half mirror 7 in an automatic focus detecting system so that an enlarged image 24 of the light source is presented to an objective 1 of the focusing microscope M.