Patents by Inventor Masaaki ERIGUCHI

Masaaki ERIGUCHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing apparatus and polishing method
    Patent number: 9409277
    Abstract: A polishing apparatus includes: a rotatable polishing table for supporting a polishing pad having a polishing surface; a top ring head having a top ring; a top ring head cover surrounding the top ring head; a dresser head having a dresser configured to dress the polishing surface; a dresser head cover surrounding the dresser head; a spray nozzle configured to spray a cleaning liquid onto an upper surface of the top ring and an outer surface of the top ring head cover when the top ring is in the substrate transfer position; and a spray nozzle configured to spray a cleaning liquid onto an outer surface of the dresser head cover when the dresser is in the retreated position.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: August 9, 2016
    Assignee: Ebara Corporation
    Inventors: Masao Umemoto, Tadakazu Sone, Hideo Aizawa, Ryuichi Kosuge, Masaaki Eriguchi
  • POLISHING APPARATUS AND POLISHING METHOD
    Publication number: 20140162536
    Abstract: A polishing apparatus includes: a rotatable polishing table for supporting a polishing pad having a polishing surface; a top ring head having a top ring; a top ring head cover surrounding the top ring head; a dresser head having a dresser configured to dress the polishing surface; a dresser head cover surrounding the dresser head; a spray nozzle configured to spray a cleaning liquid onto an upper surface of the top ring and an outer surface of the top ring head cover when the top ring is in the substrate transfer position; and a spray nozzle configured to spray a cleaning liquid onto an outer surface of the dresser head cover when the dresser is in the retreated position.
    Type: Application
    Filed: October 30, 2013
    Publication date: June 12, 2014
    Inventors: Masao UMEMOTO, Tadakazu SONE, Hideo AIZAWA, Ryuichi KOSUGE, Masaaki ERIGUCHI