Abstract: A fluid control device includes a vibrating plate unit, a driver, a flexible plate, and a base plate. The vibrating plate unit includes a vibrating plate including first and second main surfaces, and a frame plate surrounding the surrounding of the vibrating plate. The driver is bonded to the first or the second main surface of the vibrating plate and vibrates the vibrating plate. The flexible plate includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate is bonded to the main surface of the flexible plate on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.

Abstract: A piezoelectric micro-blower includes an inner case to which a peripheral portion of a vibrating plate including a piezoelectric element is fixed such that a blower chamber is defined between the inner case and the vibrating plate and an outer case arranged to cover an outer periphery of the inner case with a gap therebetween. The inner case is elastically retained in the outer case by a plurality of connecting portions. A first opening is provided in a top plate portion of the inner case that faces a central portion of the vibrating plate, and a second opening is provided in a top plate portion of the outer case that faces the first opening. A central space is provided between the top plate portions, and fluid introduced from the outside is guided to the central space through the gap between the inner and outer cases. The vibrating plate is driven in a bending mode so that air is sucked into the central space and is discharged through the second opening.