Patents by Inventor Masaaki Iwamatsu

Masaaki Iwamatsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of inspecting electric characteristics of wafers and apparatus therefor
    Patent number: 5124931
    Abstract: In a method of inspecting the electric characteristics of wafers, detecting for second and subsequent alignment operations of probe cards is automatically executed. In an apparatus for inspecting the electric characteristics of wafer, different types of wafers can be continuously inspected using the same probe card on the basis of prestored alignment data of each type of wafers.
    Type: Grant
    Filed: October 12, 1989
    Date of Patent: June 23, 1992
    Assignee: Tokyo Electron Limited
    Inventors: Masaaki Iwamatsu, Ryuichi Takebuchi, Yoshihito Marumo, Wataru Karasawa