Patents by Inventor Masaaki Mutoh

Masaaki Mutoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a semiconductor device including wafer aging, probe inspection, and feeding back the results of the inspection to the device fabrication process
    Patent number: 5219765
    Abstract: The present invention provides a method for manufacturing a highly reliable semiconductor device without waste by incorporating predetermined functions into a wafer in a wafer completion process, aging the wafer in a wafer aging process, distinguishing between non-defective and defective chips in a probe inspection process, separating chips in the wafer one by one in a dicing process, sorting out the chips into non-defective and defective chips in a selection process, then analyzing failure information and feeding back the result of the analysis to the wafer completion process in a feedback process, thereby quickly analyzing and repairing a failure process on reliability in the wafer completion process.
    Type: Grant
    Filed: July 6, 1990
    Date of Patent: June 15, 1993
    Assignee: Hitachi, Ltd.
    Inventors: Toru Yoshida, Suguru Sakaguchi, Aizo Kaneda, Kooji Serizawa, Munehisa Kishimoto, Masaaki Mutoh, Kunio Matsumoto, Isao Ohomori, Shingo Yorisaki