Patents by Inventor Masaaki Nakahata

Masaaki Nakahata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5350660
    Abstract: A resist material comprising (a) a polymer having a monomer unit having a special functional group, a monomer unit having a phenolic hydroxyl group, and if necessary a third monomer unit, (b) a photoacid generator, and (c) a solvent can provide a resist film excellent in heat resistance and adhesiveness to a substrate when exposed to light with 300 nm or less such as deep UV light, KrF excimer laser light, etc., and is suitable for forming ultrafine patterns.
    Type: Grant
    Filed: January 28, 1991
    Date of Patent: September 27, 1994
    Assignee: Wako Pure Chemical Industries, Ltd.
    Inventors: Fumiyoshi Urano, Masaaki Nakahata, Hirotoshi Fujie, Keiji Oono
  • Patent number: 5272036
    Abstract: Disclosed is a pattern forming contrast enhanced material comprising (a) a water soluble photosensitive compound selected from the group consisting of a water soluble aliphatic photosensitive compound (excluding ring compounds) having one or more of the group expressed by the formula (I), an aliphatic photosensitive quaternary ammonium salt having one or more of the group expressed by the formula (I), an aromatic photosensitive quaternary ammonium salt having one or more of the group expressed by the formula (I), and a photosensitive pyridinium salt having one or more of the group expressed by the formula (I), (b) a water soluble resin and (c) water and a pattern forming method using the same. ##STR1## According to the present invention, this material is used as a contrast enhanced layer in the exposure effected by deep ultraviolet ray such as an excimer laser beam to form a good fine pattern of a submicron order.
    Type: Grant
    Filed: March 27, 1992
    Date of Patent: December 21, 1993
    Assignees: Matsushita Electronic Industrial Co., Ltd., Wako Pure Chemical Industries, Ltd.
    Inventors: Yoshiyuki Tani, Masayuki Endo, Kazufumi Ogawa, Fumiyoshi Urano, Masaaki Nakahata
  • Patent number: 5216135
    Abstract: A diazodisulfone of the formula: ##STR1## wherein R.sup.1 is a C.sub.3-8 branched or cyclic alkyl group, and R.sup.2 is a C.sub.1-8 straight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.
    Type: Grant
    Filed: October 16, 1992
    Date of Patent: June 1, 1993
    Assignee: Wako Pure Chemical Industries, Ltd.
    Inventors: Fumiyoshi Urano, Masaaki Nakahata, Hirotoshi Fujie, Keiji Oono
  • Patent number: 5114615
    Abstract: A liquid crystal compound of the formula: ##STR1## wherein m and n are independently integers of 1 to 22; k and l are independently integers of 1 to 2; and C* is an asymmetric carbon atom, is chemically stable and can be applied to liquid crystal display devices operable at room temperature.
    Type: Grant
    Filed: September 25, 1991
    Date of Patent: May 19, 1992
    Assignees: Wako Pure Chemical Industries, Ltd., Nippon Telegraph and Telephone Corporation
    Inventors: Shigeki Ishibashi, Kouzaburou Nakamura, Tohru Maruno, Masaaki Nakahata, Takaaki Negishi, Fumiyoshi Urano
  • Patent number: 4177109
    Abstract: A .gamma.-glutamyl-p-aminoanilide derivative of the formula: ##STR1## wherein R.sup.1 and R.sup.2 are independently lower alkyl; and R.sup.3 is hydrogen, lower alkyl, carboxyl or sulfo, can be produced by reacting a N-phthalyl-.gamma.-glutamyl-p-aminoanilide derivative with hydrazine. The .gamma.-glutamyl-p-aminoanilide derivative can be used as a substrate for measuring .gamma.-glutamyl transpeptidase activity in a living sample.
    Type: Grant
    Filed: May 30, 1978
    Date of Patent: December 4, 1979
    Assignee: Wako Pure Chemical Industries, Ltd.
    Inventors: Takanori Tohyama, Masaaki Nakahata
  • Patent number: RE40211
    Abstract: wherein R1 is a C3-8 branched or cyclic alkyl group, and R2 is a C1-8 straight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.
    Type: Grant
    Filed: March 15, 2001
    Date of Patent: April 1, 2008
    Assignee: Wako Pure Chemical Industries, Ltd.
    Inventors: Fumiyoshi Urano, Masaaki Nakahata, Hirotoshi Fujie, Keiji Oono