Patents by Inventor Masaaki SHIMATANI

Masaaki SHIMATANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11876141
    Abstract: The manufacturing method for the electronic device using graphene includes: forming a catalytic metal, forming a catalytic metal, forming a passivation film so as to expose upper surfaces of the catalytic metal and the catalytic metal, forming a graphene layer on the catalytic metal and catalytic metal that are exposed, forming a insulation film so as to cover the graphene layer, forming a substrate on the insulation film, and removing the catalytic metal.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: January 16, 2024
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaaki Shimatani, Shimpei Ogawa, Shoichiro Fukushima
  • Publication number: 20230343882
    Abstract: An electromagnetic wave detector includes at least one photoelectric conversion element and a plasmon filter disposed so as to be opposite to the at least one photoelectric conversion element. A plurality of through-holes are periodically made in the plasmon filter. The at least one photoelectric conversion element includes a semiconductor layer including a region overlapping with at least one through-hole in the plurality of through-holes in planar view, an insulating layer formed so as to cover a part of the region, a two-dimensional material layer that is disposed on the other portion of the region and the insulating layer and electrically connected to the other portion of the region, a first electrode portion electrically connected to the two-dimensional material layer, and a second electrode portion electrically connected to the semiconductor layer.
    Type: Application
    Filed: May 13, 2021
    Publication date: October 26, 2023
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shimpei OGAWA, Masaaki SHIMATANI, Shoichiro FUKUSHIMA, Satoshi OKUDA
  • Publication number: 20230332942
    Abstract: An electromagnetic wave detector includes a semiconductor layer, a two-dimensional material layer, a first electrode portion, a second electrode portion, and a ferroelectric layer. Two-dimensional material layer is electrically connected to semiconductor layer. First electrode portion is electrically connected to two-dimensional material layer. Second electrode portion is electrically connected to two-dimensional material layer with semiconductor layer interposed therebetween. Ferroelectric layer is electrically connected to at least any one of first electrode portion, second electrode portion and semiconductor layer. Electromagnetic wave detector is configured such that an electric field generated from ferroelectric layer is shielded with respect to two-dimensional material layer. Alternatively, ferroelectric layer is arranged so as not to be overlapped with two-dimensional material layer in plan view.
    Type: Application
    Filed: August 24, 2021
    Publication date: October 19, 2023
    Applicant: Mitsubishi Electric Corporation
    Inventors: Masaaki SHIMATANI, Shimpei OGAWA, Shoichiro FUKUSHIMA, Satoshi OKUDA
  • Patent number: 11757055
    Abstract: An electromagnetic wave detector 100 comprises: a substrate 5 having a front surface and a back surface; an insulating layer 4 formed of a rare earth oxide, which is provided on the front surface of the substrate 5; a pair of electrodes 2 provided on the insulating layer 4 so as to be arranged to face each other across a gap; and a two-dimensional material layer 1 provided on the insulating layer 4 so as to be electrically connected to the pair of electrodes 2. The rare earth oxide contains a base material made of an oxide of a first rare earth element, and a second rare earth element different from the first rare earth element, which is activated in the base material.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: September 12, 2023
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Shoichiro Fukushima, Masaaki Shimatani, Shimpei Ogawa
  • Publication number: 20230282759
    Abstract: Electromagnetic wave detector includes semiconductor layer, first insulating film, two-dimensional material layer, first electrode, second electrode, second insulating film, and control electrode. First insulating film is arranged on semiconductor layer. First insulating film is provided with opening. Two-dimensional material layer is electrically connected to semiconductor layer in opening. Two-dimensional material layer extends from above opening to first insulating film. Second insulating film is in contact with two-dimensional material layer. Control electrode is connected to two-dimensional material layer with second insulating film interposed therebetween.
    Type: Application
    Filed: March 10, 2021
    Publication date: September 7, 2023
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shimpei OGAWA, Masaaki SHIMATANI, Shoichiro FUKUSHIMA, Satoshi OKUDA
  • Patent number: 11682741
    Abstract: An electromagnetic wave detector includes a light-receiving element, an insulating film, a two-dimensional material layer, a first electrode part, and a second electrode part. The light-receiving element includes a first semiconductor portion of a first conductivity type and a second semiconductor portion. The second semiconductor portion is joined to the first semiconductor portion. The second semiconductor portion is of a second conductivity type. The insulating film is disposed on the light-receiving element. The insulating film has an opening portion. The two-dimensional material layer is electrically connected to the first semiconductor portion in the opening portion. The two-dimensional material layer extends from on the opening portion onto the insulating film. The first electrode part is disposed on the insulating film. The first electrode part is electrically connected to the two-dimensional material layer. The second electrode part is electrically connected to the second semiconductor portion.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: June 20, 2023
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaaki Shimatani, Shimpei Ogawa, Shoichiro Fukushima, Satoshi Okuda
  • Publication number: 20230147241
    Abstract: An electromagnetic wave detector includes a semiconductor layer, a two-dimensional material layer electrically connected to the semiconductor layer, a first electrode electrically connected to the two-dimensional material layer without the semiconductor layer interposed therebetween, a second electrode electrically connected to the two-dimensional material layer with the semiconductor layer interposed therebetween, and a ferroelectric layer in contact with at least a part of the two-dimensional material layer.
    Type: Application
    Filed: March 10, 2021
    Publication date: May 11, 2023
    Applicant: Mitsubishi Electric Corporation
    Inventors: Masaaki SHIMATANI, Shimpei OGAWA, Shoichiro FUKUSHIMA, Satoshi OKUDA
  • Publication number: 20230057648
    Abstract: An electromagnetic wave detector includes a semiconductor substrate, a first insulating film disposed on the semiconductor substrate and formed so as to expose a part of the semiconductor substrate, a first electrode disposed on the first insulating film, a two-dimensional material layer having a joint part forming a Schottky junction with the semiconductor substrate in a part of the semiconductor substrate, the two-dimensional material layer extending from the joint part to the first electrode over the first insulating film, a second electrode in contact with the semiconductor substrate, and a control electrode disposed at least partly around the joint part in plan view to form a Schottky junction with the semiconductor substrate.
    Type: Application
    Filed: March 27, 2020
    Publication date: February 23, 2023
    Applicant: Mitsubishi Electric Corporation
    Inventors: Satoshi OKUDA, Shimpei OGAWA, Shoichiro FUKUSHIMA, Masaaki SHIMATANI
  • Publication number: 20220392934
    Abstract: An electromagnetic wave detector includes: a semiconductor layer in which a step is formed, the semiconductor layer having sensitivity to a detection wavelength; an insulating film disposed on the step and provided with an opening through which a part of the step is exposed; a two-dimensional material layer disposed on the insulating film and the opening, the two-dimensional material layer including a connection region electrically connected to the semiconductor layer in the opening; a first electrode disposed on the insulating film and electrically connected to the two-dimensional material layer; and a second electrode disposed on the semiconductor layer and electrically connected to the first electrode through the connection region of the two-dimensional material layer.
    Type: Application
    Filed: July 30, 2020
    Publication date: December 8, 2022
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shoichiro FUKUSHIMA, Masaaki SHIMATANI, Satoshi OKUDA, Shimpei OGAWA
  • Publication number: 20220223747
    Abstract: An electromagnetic wave detector includes a light-receiving element, an insulating film, a two-dimensional material layer, a first electrode part, and a second electrode part. The light-receiving element includes a first semiconductor portion of a first conductivity type and a second semiconductor portion. The second semiconductor portion is joined to the first semiconductor portion. The second semiconductor portion is of a second conductivity type. The insulating film is disposed on the light-receiving element. The insulating film has an opening portion. The two-dimensional material layer is electrically connected to the first semiconductor portion in the opening portion. The two-dimensional material layer extends from on the opening portion onto the insulating film. The first electrode part is disposed on the insulating film. The first electrode part is electrically connected to the two-dimensional material layer. The second electrode part is electrically connected to the second semiconductor portion.
    Type: Application
    Filed: March 26, 2020
    Publication date: July 14, 2022
    Applicant: Mitsubishi Electric Corporation
    Inventors: Masaaki SHIMATANI, Shimpei OGAWA, Shoichiro FUKUSHIMA, Satoshi OKUDA
  • Publication number: 20220197107
    Abstract: A reflective optical device has an insulation layer, a lattice group, a rear surface electrode, and a voltage application unit. Lattice group is composed of a plurality of lattices including a lattice and a lattice. Each of the plurality of lattices has a structure in which dielectric layer and graphene layer are laminated. Voltage application unit has a function of individually applying a voltage to each of lattice group. Voltage application unit includes a voltage application unit to apply a first voltage to lattice, and a voltage application unit to apply a second voltage to lattice.
    Type: Application
    Filed: June 20, 2019
    Publication date: June 23, 2022
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shimpei OGAWA, Masaaki SHIMATANI, Shoichiro FUKUSHIMA
  • Patent number: 11353360
    Abstract: This electromagnetic wave detector is provided with light reception graphene and reference graphene that are aligned on an insulating layer, first electrodes and second electrodes that are disposed so as to oppose each other and sandwich the light reception graphene and reference graphene, a gate electrode for applying a gate voltage to the light reception graphene and reference graphene, and a balanced circuit and detection circuit that are connected between the second electrodes. If electromagnetic waves are incident on the light reception graphene, photocarriers will be generated through in-band transition. If electromagnetic waves are incident on the reference graphene, photocarriers will not be generated because of the Pauli blocking effect. In a state where no electromagnetic waves are incident on the light reception graphene or reference graphene, the balanced circuit causes the first electrodes and second electrodes to have the same potential.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: June 7, 2022
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaaki Shimatani, Shimpei Ogawa, Daisuke Fujisawa, Satoshi Okuda
  • Patent number: 11302834
    Abstract: This electromagnetic wave detector that detects electromagnetic waves by performing photoelectric conversion includes: a substrate; an insulating layer that is provided on the substrate; a graphene layer that is provided on the insulating layer; a pair of electrodes, which are provided on the insulating layer, and which are connected to both ends of the graphene layer, respectively; and a contact layer that is provided such that the contact layer is in contact with the graphene layer. The contact layer is formed of a material having a polar group, and a charge is formed in the graphene layer by having the contact layer in contact with the graphene layer.
    Type: Grant
    Filed: February 24, 2016
    Date of Patent: April 12, 2022
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaaki Shimatani, Shimpei Ogawa, Daisuke Fujisawa, Satoshi Okuda
  • Patent number: 11296251
    Abstract: An electromagnetic wave detector includes: an insulating film having a first surface and a second surface facing the first surface; a first layer to perform photoelectric conversion by an incident electromagnetic wave and change in potential, the first layer being made of a first two-dimensional atomic layer material; and a second layer to receive the change in potential through the first insulating film and generate change in electrical quantity, the second layer being made of a second two-dimensional atomic layer material and provided on the first surface. In this manner, the sensitive electromagnetic wave detector detecting an incident electromagnetic wave as change in electrical quantity and having high response speed to an incident electromagnetic wave can be provided.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: April 5, 2022
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Shimpei Ogawa, Masaaki Shimatani, Shoichiro Fukushima
  • Publication number: 20210210643
    Abstract: The manufacturing method for the electronic device using graphene includes: forming a catalytic metal, forming a catalytic metal, forming a passivation film so as to expose upper surfaces of the catalytic metal and the catalytic metal, forming a graphene layer on the catalytic metal and catalytic metal that are exposed, forming a insulation film so as to cover the graphene layer, forming a substrate on the insulation film, and removing the catalytic metal.
    Type: Application
    Filed: January 9, 2019
    Publication date: July 8, 2021
    Applicant: Mitsubishi Electric Corporation
    Inventors: Masaaki SHIMATANI, Shimpei OGAWA, Shoichiro FUKUSHIMA
  • Patent number: 10957810
    Abstract: An electromagnetic wave detector comprises: p-type and n-type graphenes arranged side by side on an insulating layer; a first electrode and a second electrode opposing each other via the graphenes; a gate electrode for applying an operation voltage to the p-type and n-type graphenes; a balance circuit connected between two second electrodes; and a detection circuit. The p-type graphene has a Dirac point voltage higher than the operation voltage. The n-type graphene has a Dirac point voltage lower than the operation voltage. In a state in which no electromagnetic wave is incident on the graphenes, the balance circuit places the first electrode and the second electrode at the same potential. In a state in which an electromagnetic wave is incident on the p-type and n-type graphenes, the detection circuit detects an electric signal between the second electrodes, and outputs an electric signal in the state in which the electromagnetic wave is incident.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: March 23, 2021
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masaaki Shimatani, Shimpei Ogawa, Daisuke Fujisawa, Satoshi Okuda
  • Publication number: 20210020797
    Abstract: An electromagnetic wave detector 100 comprises: a substrate 5 having a front surface and a back surface; an insulating layer 4 formed of a rare earth oxide, which is provided on the front surface of the substrate 5; a pair of electrodes 2 provided on the insulating layer 4 so as to be arranged to face each other across a gap; and a two-dimensional material layer 1 provided on the insulating layer 4 so as to be electrically connected to the pair of electrodes 2. The rare earth oxide contains a base material made of an oxide of a first rare earth element, and a second rare earth element different from the first rare earth element, which is activated in the base material.
    Type: Application
    Filed: February 28, 2019
    Publication date: January 21, 2021
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shoichiro FUKUSHIMA, Masaaki SHIMATANI, Shimpei OGAWA
  • Publication number: 20200395499
    Abstract: An electromagnetic wave detector includes: an insulating film having a first surface and a second surface facing the first surface; a first layer to perform photoelectric conversion by an incident electromagnetic wave and change in potential, the first layer being made of a first two-dimensional atomic layer material; and a second layer to receive the change in potential through the first insulating film and generate change in electrical quantity, the second layer being made of a second two-dimensional atomic layer material and provided on the first surface. In this manner, the sensitive electromagnetic wave detector detecting an incident electromagnetic wave as change in electrical quantity and having high response speed to an incident electromagnetic wave can be provided.
    Type: Application
    Filed: August 28, 2018
    Publication date: December 17, 2020
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shimpei OGAWA, Masaaki SHIMATANI, Shoichiro FUKUSHIMA
  • Patent number: 10784394
    Abstract: An electromagnetic wave detector, which photoelectrically converts and detects an electromagnetic wave incident on a graphene layer, including: a substrate having a front surface and a back surface; a lower insulating layer provided on the front surface of the substrate; a ferroelectric layer and a pair of electrodes provided on the lower insulating layer, the pair of electrodes arranged to face each other with the ferroelectric layer sandwiched therebetween; an upper insulating layer provided on the ferroelectric layer; and a graphene layer arranged on the lower insulating layer and the upper insulating layer to connect the two electrodes. Alternatively, the electromagnetic wave detector includes: a graphene layer provided on the lower insulating layer; and a ferroelectric layer provided on the graphene layer with an upper insulating layer interposed therebetween and a pair of electrodes provided on the graphene layer to face each other with the ferroelectric layer sandwiched therebetween.
    Type: Grant
    Filed: April 20, 2017
    Date of Patent: September 22, 2020
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Shimpei Ogawa, Daisuke Fujisawa, Masaaki Shimatani, Satoshi Okuda
  • Publication number: 20200264038
    Abstract: This electromagnetic wave detector is provided with light reception graphene and reference graphene that are aligned on an insulating layer, first electrodes and second electrodes that are disposed so as to oppose each other and sandwich the light reception graphene and reference graphene, a gate electrode for applying a gate voltage to the light reception graphene and reference graphene, and a balanced circuit and detection circuit that are connected between the second electrodes. If electromagnetic waves are incident on the light reception graphene, photocarriers will be generated through in-band transition. If electromagnetic waves are incident on the reference graphene, photocarriers will not be generated because of the Pauli blocking effect. In a state where no electromagnetic waves are incident on the light reception graphene or reference graphene, the balanced circuit causes the first electrodes and second electrodes to have the same potential.
    Type: Application
    Filed: October 19, 2017
    Publication date: August 20, 2020
    Applicant: Mitsubishi Electric Corporation
    Inventors: Masaaki SHIMATANI, Shimpei OGAWA, Daisuke FUJISAWA, Satoshi OKUDA