Abstract: An optical control element which has a thin plate having an electro-optical effect and a thickness of 10 ?m or less, optical waveguides formed in the thin plate, and a plurality of optical control portions for controlling light propagating through the optical waveguide, wherein, a portion between a plurality of optical control portions is connected by a control signal wiring line that includes any one of a coplanar waveguide type disposed only on a surface of the thin plate, a coplanar waveguide type disposed on the surface of the thin plate and a ground electrode disposed on a back surface thereof, or a micro strip line, for arrival times of light and electric signal set to be substantially the same.

Abstract: To provide an optical waveguide device which can allow a light-receiving element to be precisely aligned with a diffused waveguide formed in a dielectric substrate to implement an evanescent coupling light-receiving element. An optical waveguide device includes a dielectric substrate 1, a diffused waveguide 2 formed by thermally diffusing a high-refractive material into the dielectric substrate, and a light-receiving element 4 which is disposed above the diffused waveguide and which receives a part of an optical wave propagating in the diffused waveguide. Here, at least a part 3 of a pedestal 3 and 5 supporting the light-receiving element above the dielectric substrate is formed by disposing the high-refractive material in a predetermined pattern in the vicinity of the diffused waveguide and thermally diffusing the high-refractive material at the same time as forming the diffused waveguide.

Abstract: An optical control element which has a thin plate having an electro-optical effect and a thickness of 10 ?m or less, optical waveguides formed in the thin plate, and a plurality of optical control portions for controlling light propagating through the optical waveguide, wherein, a portion between a plurality of optical control portions is connected by a control signal wiring line that includes any one of a coplanar waveguide type disposed only on a surface of the thin plate, a coplanar waveguide type disposed on the surface of the thin plate and a ground electrode disposed on a back surface thereof, or a micro strip line, for arrival times of light and electric signal set to be substantially the same.

Abstract: To provide an optical waveguide device which can allow a light-receiving element to be precisely aligned with a diffused waveguide formed in a dielectric substrate to implement an evanescent coupling light-receiving element. An optical waveguide device includes a dielectric substrate 1, a diffused waveguide 2 formed by thermally diffusing a high-refractive material into the dielectric substrate, and a light-receiving element 4 which is disposed above the diffused waveguide and which receives a part of an optical wave propagating in the diffused waveguide. Here, at least a part 3 of a pedestal 3 and 5 supporting the light-receiving element above the dielectric substrate is formed by disposing the high-refractive material in a predetermined pattern in the vicinity of the diffused waveguide and thermally diffusing the high-refractive material at the same time as forming the diffused waveguide.

Abstract: A polishing apparatus comprises holding means for holding an object with the surface to be polished being exposed, first driving means for pressing the holding means against the polishing cloth with variable pressing force and rotating the holding means. It also comprises a guide ring body, provided around the holding means and independent of rotation of the holding means, a lower end of the guide ring body being brought into contact with the polishing cloth. It further comprises second driving means for pressing the guide ring body against the polishing cloth with variable pressing force and rotating the guide ring body independent of rotation of the holding means.