Abstract: An additive to a polyester base synthetic resin containing a plasticizer that comprises at least one compound selected from hydroxy aliphatic monocarboxylic acid ester and carboxylic acid amide is provided. Also, a polyester base synthetic resin composition comprising a polyester-base synthetic resin, a plasticizer, and at least one compound selected from hydroxy aliphatic monocarboxylic acid ester and carboxylic acid amide are also provided. Further, the invention provides a plasticizer for biodegradable resins that can impart flexibility without disturbing the transparency of the biodegradable resins. The plasticizer for biodegradable resins comprises a compound selected from (i) to (III) below. A biodegradable composition comprises the plasticizer.

Abstract: A rubber composition and method of making a rubber composition which is improved in a dispersibility of silica into rubber, a heat generating property and an abrasion property.

Abstract: There is described a wafer processing apparatus intended to efficiently secure a wafer on an electrostatic chuck. A heater is disposed in a processing chamber for heating a wafer, and a dielectric plate for supporting the wafer is also disposed in the processing chamber. First and second electrodes are embedded in the dielectric plate, and first and second variable D.C. power supplies are disposed so as to supply voltages to the first and second electrodes, respectively. After the wafer has been placed on an electrostatic chuck, the wafer is pre-heated before being subjected to attraction force. After completion of the pre-heating phase, the first and second D.C. power supplies supply voltages to the first and second electrodes, thus securing the wafer on the dielectric plate.

Abstract: An additive for a rubber composition consists essentially of an ester of (i) an aliphatic polyvalent carboxylic acid with (iii) a (poly)oxyalkylene derivative, and having at least one carboxyl group in its molecule, or an ester of (ii) an aromatic polyvalent carboxylic acid with (iii) a (poly)oxyalkylene derivative, and having at least one carboxyl group bonded to an aromatic ring in its molecule. And also, it relates to an additive composition, a rubber composition and a pneumatic tire using such an additive for a rubber composition.

Abstract: A rubber composition comprising (A) at least one natural or synthetic diene rubber, (B) an inorganic filler comprising at least one of silica and silicates as the main component and (C) an addition salt of an amine represented by general formula (I): wherein R1 represents a C8 to C24 alkyl group, an aryl group or an aralkyl group, R2 and R3 represent a hydrogen atom, a C1 to C12 alkyl group, an aryl group, an aralkyl group or a hydroxyalkyl group and R4 represents a C6 to C24 alkyl or alkenyl group, an aryl group or an aralkyl group; and a pneumatic tire produced by using the rubber composition.

Abstract: There is described a wafer processing apparatus intended to efficiently secure a wafer on an electrostatic chuck. A heater is disposed in a processing chamber for heating a wafer, and a dielectric plate for supporting the wafer is also disposed in the processing chamber. First and second electrodes are embedded in the dielectric plate, and first and second variable D.C. power supplies are disposed so as to supply voltages to the first and second electrodes, respectively. After the wafer has been placed on an electrostatic chuck, the wafer is pre-heated before being subjected to attraction force. After completion of the pre-heating phase, the first and second D.C. power supplies supply voltages to the first and second electrodes, thus securing the wafer on the dielectric plate.

Abstract: A plasma processing apparatus capable of attracting and holding a semiconductor wafer reliably once the processing of the semiconductor wafer is started includes: a vacuum chamber; an electrode arranged inside the vacuum chamber; a dielectric film formed on a surface of the electrode; a gas supply port leading to the vacuum chamber; a high-frequency electric power supply connected to the electrode; a memory operation unit which depends on a processing condition for producing a desired plasma, to calculate and output the voltage value corresponding to the sum of a value of a minimal actual attract and hold voltage required to be applied between one surface of the semiconductor wafer mounted on the dielectric film and a surface of the dielectric film to attract and hold one surface of the semiconductor wafer on the surface of the dielectric film and a value of a self-bias voltage generated at the other surface of the semiconductor wafer when the desired plasma is produced; and an electrostatic chuck power suppl

Abstract: Provided are a rubber composition improved in an anti-static property and a pneumatic tire using the same for its tread part, wherein the rubber composition comprises natural rubber and/or diene base synthetic rubber and a white filler as a filler, and further comprises an anionic anti-static agent or a polyoxyalkylene glycol compound represented by the flowing formulas (I), (II) or (III): ##STR1## wherein R.sup.1 and R.sup.3 each represent a linear or branched, saturated or unsaturated aliphatic hydrocarbon group having 1 to 21 carbon atoms, or an aryl group; R.sup.4 and R.sup.5 each represent a hydrogen atom, a linear or branched, saturated or unsaturated aliphatic hydrocarbon group having 1 to 21 carbon atoms, or an aryl group; R.sup.1 and R.sup.3 in the above formula (I), R.sup.4 and R.sup.3 in the above formula (II) and R.sup.4 and R.sup.5 in the above formula (III) in one same molecule may be the same as or different from each other; R.sup.

Abstract: A plasma generating apparatus capable of improving the uniformity of a plasma processing and coping with a larger diameter of a substrate is obtained. Microwaves are distributed and emitted from a waveguide through the branching portions of a T branch to four rod antennas. The microwaves are introduced through four dielectric tubes into a vacuum vessel. In the vacuum vessel, a multi-cusp magnetic field and an electron cyclotron resonance region are caused by permanent magnets located around the vessel and, by an interaction between a vibrational electric field of the microwaves and a magnetic field, highly uniform plasma is generated in a region where a substrate or the like is subjected to a plasma processing.

Abstract: There is provided a plasma generating apparatus comprising: a waveguide for guiding a microwave; a vacuum vessel connected to the waveguide, having a means for supplying a gas for discharging electrons and a means for evacuating; and a dielectric member in a tube-like shape or a rod-like shape which is inserted in the vacuum vessel, wherein the dielectric member is provided with a means for emitting the microwave, whereby it is possible to apply the electric power of microwave effectively to plasma of high density exceeding so-called cut-off density and to homogenize the distribution of plasma in the vacuum vessel.

Abstract: An introduction pipe for gas or the like for introducing water or water vapor is connected to a vacuum process chamber. The vacuum process chamber is evacuated through an evacuation exhaust port, and the introduced water vapor or water is solidified or liquefied by adiabatic expansion using a floating fine particle as a core. The particle on which the water vapor or the like is solidified or liquefied is discharged outside the vacuum process chamber. Thus, a semiconductor manufacturing device capable of reducing the number of fine particles on a wafer without decreasing uptime ratio is achieved.

Abstract: An additive for masticating natural rubber comprising at least one compound selected from the group consisting of benzoic acids, naphthoic acids, dicarboxylic acids and compounds represented by Formula (IV): ##STR1## wherein m and n each represent an integer of 1 to 3; p represents an integer of 1 to 4; m+n+p=6; X is O, NR.sup.8 or (R.sup.9 O).sub.q ; R.sup.6 is a C.sub.1 .about.C.sub.24 alkyl, a C.sub.2 .about.C.sub.24 alkenyl, or a C.sub.6 .about.C.sub.24 aryl group; and R.sup.7 is H, OH, an alkyl, alkenyl or aryl group; R.sup.8 is H or a C.sub.1 .about.C.sub.24 alkyl group; R.sup.9 is a C.sub.1 .about.C.sub.4 alkyl group; q is an integer of 1 to 5, a mastication method and a natural rubber composition each of which uses the additive, and a pneumatic tire using the natural rubber composition.

Abstract: The cold resistance of chloroprene rubber can be improved by blending an ester derived from a specified glycol component and a specified fatty acid component without any adverse effect upon the other physical and chemical properties of the rubber. This ester is not extracted with oily matters such as oil or grease, so that the resulting chloroprene rubber composition hardly exhibits a decrease in cold resistance even after extraction with oily matters.

Abstract: A mixed fuel of coal and fuel oil can be effectively stabilized by adding thereinto a compound obtained by the condensation reaction between a sulfonated aromatic compound having a hydrophobic group and formalin.